11/2/2011	9:09:55 AM	Main Vac valve closed
11/2/2011	9:10:04 AM	Main Vac valve opened
11/2/2011	9:10:32 AM	Recipe started at 9:10 AM
11/2/2011	9:10:32 AM	Helium valve closed
11/2/2011	9:10:32 AM	H2 valve closed
11/2/2011	9:10:32 AM	BCl3 valve closed
11/2/2011	9:10:32 AM	PH3 valve closed
11/2/2011	9:10:32 AM	SiCl4 pre valve closed
11/2/2011	9:10:33 AM	SiCl4 post valve closed
11/2/2011	9:10:33 AM	Main Vac valve closed
11/2/2011	9:10:33 AM	Bypass valve closed
11/2/2011	9:10:33 AM	Bubbler valve closed
11/2/2011	9:10:33 AM	Helium MFC set to  0.000000
11/2/2011	9:10:33 AM	H2 MFC set to  0.000000
11/2/2011	9:10:33 AM	BCl3 MFC set to  0.000000
11/2/2011	9:10:33 AM	PHl3 MFC set to  0.000000
11/2/2011	9:10:33 AM	SiCl4 MFC set to  0.000000
11/2/2011	9:10:33 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:10:33 AM	Tube furnace set to 0
11/2/2011	9:10:36 AM	Helium valve closed
11/2/2011	9:10:36 AM	BCl3 valve closed
11/2/2011	9:10:36 AM	PH3 valve closed
11/2/2011	9:10:36 AM	SiCl4 pre valve closed
11/2/2011	9:10:36 AM	SiCl4 post valve closed
11/2/2011	9:10:36 AM	Main Vac valve closed
11/2/2011	9:10:36 AM	Bypass valve closed
11/2/2011	9:10:36 AM	Bubbler valve closed
11/2/2011	9:10:36 AM	H2 valve opened
11/2/2011	9:10:36 AM	Helium MFC set to  0.000000
11/2/2011	9:10:36 AM	H2 MFC set to  500.000000
11/2/2011	9:10:36 AM	BCl3 MFC set to  0.000000
11/2/2011	9:10:36 AM	PHl3 MFC set to  0.000000
11/2/2011	9:10:36 AM	SiCl4 MFC set to  0.000000
11/2/2011	9:10:36 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:10:36 AM	Tube furnace set to 0
11/2/2011	9:11:44 AM	Helium valve closed
11/2/2011	9:11:44 AM	BCl3 valve closed
11/2/2011	9:11:44 AM	PH3 valve closed
11/2/2011	9:11:44 AM	SiCl4 pre valve closed
11/2/2011	9:11:44 AM	SiCl4 post valve closed
11/2/2011	9:11:44 AM	Main Vac valve closed
11/2/2011	9:11:44 AM	Bypass valve closed
11/2/2011	9:11:44 AM	H2 valve opened
11/2/2011	9:11:44 AM	Bubbler valve opened
11/2/2011	9:11:44 AM	Helium MFC set to  0.000000
11/2/2011	9:11:44 AM	H2 MFC set to  500.000000
11/2/2011	9:11:44 AM	BCl3 MFC set to  0.000000
11/2/2011	9:11:44 AM	PHl3 MFC set to  0.000000
11/2/2011	9:11:44 AM	SiCl4 MFC set to  0.000000
11/2/2011	9:11:44 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:11:44 AM	Tube furnace set to 0
11/2/2011	9:11:45 AM	Helium valve closed
11/2/2011	9:11:45 AM	BCl3 valve closed
11/2/2011	9:11:45 AM	PH3 valve closed
11/2/2011	9:11:45 AM	SiCl4 pre valve closed
11/2/2011	9:11:45 AM	SiCl4 post valve closed
11/2/2011	9:11:45 AM	Main Vac valve closed
11/2/2011	9:11:45 AM	Bypass valve closed
11/2/2011	9:11:45 AM	H2 valve opened
11/2/2011	9:11:45 AM	Bubbler valve opened
11/2/2011	9:11:45 AM	Helium MFC set to  0.000000
11/2/2011	9:11:45 AM	H2 MFC set to  500.000000
11/2/2011	9:11:45 AM	BCl3 MFC set to  0.000000
11/2/2011	9:11:45 AM	PHl3 MFC set to  0.000000
11/2/2011	9:11:45 AM	SiCl4 MFC set to  0.000000
11/2/2011	9:11:45 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:11:46 AM	Tube furnace set to 1025
11/2/2011	9:31:45 AM	Helium valve closed
11/2/2011	9:31:45 AM	BCl3 valve closed
11/2/2011	9:31:45 AM	PH3 valve closed
11/2/2011	9:31:45 AM	Main Vac valve closed
11/2/2011	9:31:45 AM	Bypass valve closed
11/2/2011	9:31:45 AM	H2 valve opened
11/2/2011	9:31:45 AM	SiCl4 pre valve opened
11/2/2011	9:31:45 AM	SiCl4 post valve opened
11/2/2011	9:31:45 AM	Bubbler valve opened
11/2/2011	9:31:45 AM	Helium MFC set to  0.000000
11/2/2011	9:31:45 AM	H2 MFC set to  500.000000
11/2/2011	9:31:45 AM	BCl3 MFC set to  0.000000
11/2/2011	9:31:45 AM	PHl3 MFC set to  0.000000
11/2/2011	9:31:45 AM	SiCl4 MFC set to  50.000000
11/2/2011	9:31:45 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:31:46 AM	Tube furnace set to 1025
11/2/2011	9:51:46 AM	Helium valve closed
11/2/2011	9:51:46 AM	BCl3 valve closed
11/2/2011	9:51:46 AM	PH3 valve closed
11/2/2011	9:51:46 AM	SiCl4 pre valve closed
11/2/2011	9:51:46 AM	SiCl4 post valve closed
11/2/2011	9:51:46 AM	Main Vac valve closed
11/2/2011	9:51:46 AM	Bypass valve closed
11/2/2011	9:51:46 AM	H2 valve opened
11/2/2011	9:51:46 AM	Bubbler valve opened
11/2/2011	9:51:46 AM	Helium MFC set to  0.000000
11/2/2011	9:51:46 AM	H2 MFC set to  500.000000
11/2/2011	9:51:46 AM	BCl3 MFC set to  0.000000
11/2/2011	9:51:46 AM	PHl3 MFC set to  0.000000
11/2/2011	9:51:46 AM	SiCl4 MFC set to  0.000000
11/2/2011	9:51:46 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:51:46 AM	Tube furnace set to 950
11/2/2011	9:54:46 AM	H2 valve closed
11/2/2011	9:54:46 AM	BCl3 valve closed
11/2/2011	9:54:46 AM	PH3 valve closed
11/2/2011	9:54:46 AM	SiCl4 pre valve closed
11/2/2011	9:54:46 AM	SiCl4 post valve closed
11/2/2011	9:54:46 AM	Main Vac valve closed
11/2/2011	9:54:46 AM	Bypass valve closed
11/2/2011	9:54:46 AM	Helium valve opened
11/2/2011	9:54:46 AM	Bubbler valve opened
11/2/2011	9:54:46 AM	Helium MFC set to  500.000000
11/2/2011	9:54:46 AM	H2 MFC set to  0.000000
11/2/2011	9:54:46 AM	BCl3 MFC set to  0.000000
11/2/2011	9:54:46 AM	PHl3 MFC set to  0.000000
11/2/2011	9:54:46 AM	SiCl4 MFC set to  0.000000
11/2/2011	9:54:46 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:54:46 AM	Tube furnace set to 900
11/2/2011	9:57:46 AM	H2 valve closed
11/2/2011	9:57:46 AM	BCl3 valve closed
11/2/2011	9:57:46 AM	PH3 valve closed
11/2/2011	9:57:46 AM	SiCl4 pre valve closed
11/2/2011	9:57:46 AM	SiCl4 post valve closed
11/2/2011	9:57:46 AM	Main Vac valve closed
11/2/2011	9:57:46 AM	Bypass valve closed
11/2/2011	9:57:46 AM	Helium valve opened
11/2/2011	9:57:46 AM	Bubbler valve opened
11/2/2011	9:57:46 AM	Helium MFC set to  500.000000
11/2/2011	9:57:46 AM	H2 MFC set to  0.000000
11/2/2011	9:57:46 AM	BCl3 MFC set to  0.000000
11/2/2011	9:57:46 AM	PHl3 MFC set to  0.000000
11/2/2011	9:57:46 AM	SiCl4 MFC set to  0.000000
11/2/2011	9:57:46 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:57:46 AM	Tube furnace set to 850
11/2/2011	10:00:46 AM	H2 valve closed
11/2/2011	10:00:46 AM	BCl3 valve closed
11/2/2011	10:00:46 AM	PH3 valve closed
11/2/2011	10:00:46 AM	SiCl4 pre valve closed
11/2/2011	10:00:46 AM	SiCl4 post valve closed
11/2/2011	10:00:46 AM	Main Vac valve closed
11/2/2011	10:00:46 AM	Bypass valve closed
11/2/2011	10:00:46 AM	Helium valve opened
11/2/2011	10:00:46 AM	Bubbler valve opened
11/2/2011	10:00:46 AM	Helium MFC set to  500.000000
11/2/2011	10:00:46 AM	H2 MFC set to  0.000000
11/2/2011	10:00:46 AM	BCl3 MFC set to  0.000000
11/2/2011	10:00:46 AM	PHl3 MFC set to  0.000000
11/2/2011	10:00:46 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:00:46 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:00:46 AM	Tube furnace set to 800
11/2/2011	10:03:46 AM	H2 valve closed
11/2/2011	10:03:46 AM	BCl3 valve closed
11/2/2011	10:03:46 AM	PH3 valve closed
11/2/2011	10:03:46 AM	SiCl4 pre valve closed
11/2/2011	10:03:46 AM	SiCl4 post valve closed
11/2/2011	10:03:46 AM	Main Vac valve closed
11/2/2011	10:03:46 AM	Bypass valve closed
11/2/2011	10:03:46 AM	Helium valve opened
11/2/2011	10:03:46 AM	Bubbler valve opened
11/2/2011	10:03:46 AM	Helium MFC set to  500.000000
11/2/2011	10:03:46 AM	H2 MFC set to  0.000000
11/2/2011	10:03:46 AM	BCl3 MFC set to  0.000000
11/2/2011	10:03:46 AM	PHl3 MFC set to  0.000000
11/2/2011	10:03:46 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:03:46 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:03:47 AM	Tube furnace set to 750
11/2/2011	10:06:47 AM	H2 valve closed
11/2/2011	10:06:47 AM	BCl3 valve closed
11/2/2011	10:06:47 AM	PH3 valve closed
11/2/2011	10:06:47 AM	SiCl4 pre valve closed
11/2/2011	10:06:47 AM	SiCl4 post valve closed
11/2/2011	10:06:47 AM	Main Vac valve closed
11/2/2011	10:06:47 AM	Bypass valve closed
11/2/2011	10:06:47 AM	Helium valve opened
11/2/2011	10:06:47 AM	Bubbler valve opened
11/2/2011	10:06:47 AM	Helium MFC set to  500.000000
11/2/2011	10:06:47 AM	H2 MFC set to  0.000000
11/2/2011	10:06:47 AM	BCl3 MFC set to  0.000000
11/2/2011	10:06:47 AM	PHl3 MFC set to  0.000000
11/2/2011	10:06:47 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:06:47 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:06:47 AM	Tube furnace set to 0
11/2/2011	10:26:47 AM	Helium valve closed
11/2/2011	10:26:47 AM	H2 valve closed
11/2/2011	10:26:47 AM	BCl3 valve closed
11/2/2011	10:26:47 AM	PH3 valve closed
11/2/2011	10:26:47 AM	SiCl4 pre valve closed
11/2/2011	10:26:47 AM	SiCl4 post valve closed
11/2/2011	10:26:47 AM	Main Vac valve closed
11/2/2011	10:26:47 AM	Bypass valve closed
11/2/2011	10:26:47 AM	Bubbler valve closed
11/2/2011	10:26:47 AM	Helium MFC set to  0.000000
11/2/2011	10:26:47 AM	H2 MFC set to  0.000000
11/2/2011	10:26:47 AM	BCl3 MFC set to  0.000000
11/2/2011	10:26:47 AM	PHl3 MFC set to  0.000000
11/2/2011	10:26:47 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:26:47 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:26:47 AM	Tube furnace set to 0
11/2/2011	10:26:48 AM	Run finished at 10:26 AM
11/2/2011	10:35:25 AM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	10:35:26 AM	Recipe started at 10:35 AM
11/2/2011	10:35:26 AM	Helium valve closed
11/2/2011	10:35:26 AM	H2 valve closed
11/2/2011	10:35:26 AM	BCl3 valve closed
11/2/2011	10:35:26 AM	PH3 valve closed
11/2/2011	10:35:26 AM	SiCl4 pre valve closed
11/2/2011	10:35:26 AM	SiCl4 post valve closed
11/2/2011	10:35:26 AM	Main Vac valve closed
11/2/2011	10:35:26 AM	Bubbler valve closed
11/2/2011	10:35:26 AM	Bypass valve opened
11/2/2011	10:35:26 AM	Helium MFC set to  0.000000
11/2/2011	10:35:26 AM	H2 MFC set to  0.000000
11/2/2011	10:35:26 AM	BCl3 MFC set to  0.000000
11/2/2011	10:35:26 AM	PHl3 MFC set to  0.000000
11/2/2011	10:35:26 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:35:26 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:35:26 AM	Tube furnace set to 0
11/2/2011	10:36:29 AM	Helium valve closed
11/2/2011	10:36:29 AM	H2 valve closed
11/2/2011	10:36:29 AM	BCl3 valve closed
11/2/2011	10:36:29 AM	PH3 valve closed
11/2/2011	10:36:29 AM	SiCl4 pre valve closed
11/2/2011	10:36:29 AM	SiCl4 post valve closed
11/2/2011	10:36:29 AM	Main Vac valve closed
11/2/2011	10:36:29 AM	Bubbler valve closed
11/2/2011	10:36:29 AM	Bypass valve opened
11/2/2011	10:36:29 AM	Helium MFC set to  0.000000
11/2/2011	10:36:29 AM	H2 MFC set to  0.000000
11/2/2011	10:36:29 AM	BCl3 MFC set to  0.000000
11/2/2011	10:36:29 AM	PHl3 MFC set to  0.000000
11/2/2011	10:36:29 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:36:29 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:36:29 AM	Tube furnace set to 0
11/2/2011	10:36:37 AM	Helium valve closed
11/2/2011	10:36:37 AM	H2 valve closed
11/2/2011	10:36:37 AM	BCl3 valve closed
11/2/2011	10:36:37 AM	PH3 valve closed
11/2/2011	10:36:37 AM	SiCl4 pre valve closed
11/2/2011	10:36:37 AM	SiCl4 post valve closed
11/2/2011	10:36:37 AM	Bypass valve closed
11/2/2011	10:36:37 AM	Bubbler valve closed
11/2/2011	10:36:37 AM	Main Vac valve opened
11/2/2011	10:36:37 AM	Helium MFC set to  0.000000
11/2/2011	10:36:37 AM	H2 MFC set to  0.000000
11/2/2011	10:36:37 AM	BCl3 MFC set to  0.000000
11/2/2011	10:36:37 AM	PHl3 MFC set to  0.000000
11/2/2011	10:36:37 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:36:37 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:36:37 AM	Tube furnace set to 0
11/2/2011	10:36:38 AM	Run finished at 10:36 AM
11/2/2011	10:36:38 AM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	10:40:49 AM	Recipe started at 10:40 AM
11/2/2011	10:40:49 AM	Helium valve closed
11/2/2011	10:40:49 AM	H2 valve closed
11/2/2011	10:40:49 AM	BCl3 valve closed
11/2/2011	10:40:49 AM	PH3 valve closed
11/2/2011	10:40:49 AM	SiCl4 pre valve closed
11/2/2011	10:40:49 AM	SiCl4 post valve closed
11/2/2011	10:40:49 AM	Bypass valve closed
11/2/2011	10:40:49 AM	Bubbler valve closed
11/2/2011	10:40:49 AM	Main Vac valve opened
11/2/2011	10:40:49 AM	Helium MFC set to  0.000000
11/2/2011	10:40:49 AM	H2 MFC set to  0.000000
11/2/2011	10:40:49 AM	BCl3 MFC set to  0.000000
11/2/2011	10:40:49 AM	PHl3 MFC set to  0.000000
11/2/2011	10:40:49 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:40:49 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:40:49 AM	Tube furnace set to 150
11/2/2011	10:41:19 AM	H2 valve closed
11/2/2011	10:41:19 AM	BCl3 valve closed
11/2/2011	10:41:19 AM	PH3 valve closed
11/2/2011	10:41:19 AM	SiCl4 pre valve closed
11/2/2011	10:41:19 AM	SiCl4 post valve closed
11/2/2011	10:41:19 AM	Bypass valve closed
11/2/2011	10:41:19 AM	Bubbler valve closed
11/2/2011	10:41:19 AM	Helium valve opened
11/2/2011	10:41:19 AM	Main Vac valve opened
11/2/2011	10:41:19 AM	Helium MFC set to  20.000000
11/2/2011	10:41:19 AM	H2 MFC set to  0.000000
11/2/2011	10:41:19 AM	BCl3 MFC set to  0.000000
11/2/2011	10:41:19 AM	PHl3 MFC set to  0.000000
11/2/2011	10:41:19 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:41:19 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:41:19 AM	Tube furnace set to 150
11/2/2011	10:41:50 AM	Helium valve closed
11/2/2011	10:41:50 AM	H2 valve closed
11/2/2011	10:41:50 AM	BCl3 valve closed
11/2/2011	10:41:50 AM	PH3 valve closed
11/2/2011	10:41:50 AM	SiCl4 pre valve closed
11/2/2011	10:41:50 AM	SiCl4 post valve closed
11/2/2011	10:41:50 AM	Bypass valve closed
11/2/2011	10:41:50 AM	Bubbler valve closed
11/2/2011	10:41:50 AM	Main Vac valve opened
11/2/2011	10:41:50 AM	Helium MFC set to  0.000000
11/2/2011	10:41:50 AM	H2 MFC set to  0.000000
11/2/2011	10:41:50 AM	BCl3 MFC set to  0.000000
11/2/2011	10:41:50 AM	PHl3 MFC set to  0.000000
11/2/2011	10:41:50 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:41:50 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:41:50 AM	Tube furnace set to 150
11/2/2011	10:42:20 AM	H2 valve closed
11/2/2011	10:42:20 AM	BCl3 valve closed
11/2/2011	10:42:20 AM	PH3 valve closed
11/2/2011	10:42:20 AM	SiCl4 pre valve closed
11/2/2011	10:42:20 AM	SiCl4 post valve closed
11/2/2011	10:42:20 AM	Bypass valve closed
11/2/2011	10:42:20 AM	Bubbler valve closed
11/2/2011	10:42:20 AM	Helium valve opened
11/2/2011	10:42:20 AM	Main Vac valve opened
11/2/2011	10:42:20 AM	Helium MFC set to  20.000000
11/2/2011	10:42:20 AM	H2 MFC set to  0.000000
11/2/2011	10:42:20 AM	BCl3 MFC set to  0.000000
11/2/2011	10:42:20 AM	PHl3 MFC set to  0.000000
11/2/2011	10:42:20 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:42:20 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:42:20 AM	Tube furnace set to 150
11/2/2011	10:42:50 AM	Helium valve closed
11/2/2011	10:42:50 AM	H2 valve closed
11/2/2011	10:42:50 AM	BCl3 valve closed
11/2/2011	10:42:50 AM	PH3 valve closed
11/2/2011	10:42:50 AM	SiCl4 pre valve closed
11/2/2011	10:42:50 AM	SiCl4 post valve closed
11/2/2011	10:42:50 AM	Bypass valve closed
11/2/2011	10:42:50 AM	Bubbler valve closed
11/2/2011	10:42:50 AM	Main Vac valve opened
11/2/2011	10:42:50 AM	Helium MFC set to  0.000000
11/2/2011	10:42:50 AM	H2 MFC set to  0.000000
11/2/2011	10:42:50 AM	BCl3 MFC set to  0.000000
11/2/2011	10:42:50 AM	PHl3 MFC set to  0.000000
11/2/2011	10:42:50 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:42:50 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:42:50 AM	Tube furnace set to 150
11/2/2011	10:43:20 AM	H2 valve closed
11/2/2011	10:43:20 AM	BCl3 valve closed
11/2/2011	10:43:20 AM	PH3 valve closed
11/2/2011	10:43:20 AM	SiCl4 pre valve closed
11/2/2011	10:43:20 AM	SiCl4 post valve closed
11/2/2011	10:43:20 AM	Bypass valve closed
11/2/2011	10:43:20 AM	Bubbler valve closed
11/2/2011	10:43:20 AM	Helium valve opened
11/2/2011	10:43:20 AM	Main Vac valve opened
11/2/2011	10:43:20 AM	Helium MFC set to  20.000000
11/2/2011	10:43:20 AM	H2 MFC set to  0.000000
11/2/2011	10:43:20 AM	BCl3 MFC set to  0.000000
11/2/2011	10:43:20 AM	PHl3 MFC set to  0.000000
11/2/2011	10:43:20 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:43:20 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:43:20 AM	Tube furnace set to 150
11/2/2011	10:43:50 AM	Helium valve closed
11/2/2011	10:43:50 AM	H2 valve closed
11/2/2011	10:43:50 AM	BCl3 valve closed
11/2/2011	10:43:50 AM	PH3 valve closed
11/2/2011	10:43:50 AM	SiCl4 pre valve closed
11/2/2011	10:43:50 AM	SiCl4 post valve closed
11/2/2011	10:43:50 AM	Bypass valve closed
11/2/2011	10:43:50 AM	Bubbler valve closed
11/2/2011	10:43:50 AM	Main Vac valve opened
11/2/2011	10:43:50 AM	Helium MFC set to  0.000000
11/2/2011	10:43:50 AM	H2 MFC set to  0.000000
11/2/2011	10:43:50 AM	BCl3 MFC set to  0.000000
11/2/2011	10:43:50 AM	PHl3 MFC set to  0.000000
11/2/2011	10:43:50 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:43:50 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:43:50 AM	Tube furnace set to 150
11/2/2011	10:44:20 AM	H2 valve closed
11/2/2011	10:44:20 AM	BCl3 valve closed
11/2/2011	10:44:20 AM	PH3 valve closed
11/2/2011	10:44:20 AM	SiCl4 pre valve closed
11/2/2011	10:44:20 AM	SiCl4 post valve closed
11/2/2011	10:44:20 AM	Bypass valve closed
11/2/2011	10:44:20 AM	Bubbler valve closed
11/2/2011	10:44:21 AM	Helium valve opened
11/2/2011	10:44:21 AM	Main Vac valve opened
11/2/2011	10:44:21 AM	Helium MFC set to  20.000000
11/2/2011	10:44:21 AM	H2 MFC set to  0.000000
11/2/2011	10:44:21 AM	BCl3 MFC set to  0.000000
11/2/2011	10:44:21 AM	PHl3 MFC set to  0.000000
11/2/2011	10:44:21 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:44:21 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:44:21 AM	Tube furnace set to 150
11/2/2011	10:44:51 AM	Helium valve closed
11/2/2011	10:44:51 AM	H2 valve closed
11/2/2011	10:44:51 AM	BCl3 valve closed
11/2/2011	10:44:51 AM	PH3 valve closed
11/2/2011	10:44:51 AM	SiCl4 pre valve closed
11/2/2011	10:44:51 AM	SiCl4 post valve closed
11/2/2011	10:44:51 AM	Bypass valve closed
11/2/2011	10:44:51 AM	Bubbler valve closed
11/2/2011	10:44:51 AM	Main Vac valve opened
11/2/2011	10:44:51 AM	Helium MFC set to  0.000000
11/2/2011	10:44:51 AM	H2 MFC set to  0.000000
11/2/2011	10:44:51 AM	BCl3 MFC set to  0.000000
11/2/2011	10:44:51 AM	PHl3 MFC set to  0.000000
11/2/2011	10:44:51 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:44:51 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:44:51 AM	Tube furnace set to 150
11/2/2011	10:45:21 AM	H2 valve closed
11/2/2011	10:45:21 AM	BCl3 valve closed
11/2/2011	10:45:21 AM	PH3 valve closed
11/2/2011	10:45:21 AM	SiCl4 pre valve closed
11/2/2011	10:45:21 AM	SiCl4 post valve closed
11/2/2011	10:45:21 AM	Bypass valve closed
11/2/2011	10:45:21 AM	Bubbler valve closed
11/2/2011	10:45:21 AM	Helium valve opened
11/2/2011	10:45:21 AM	Main Vac valve opened
11/2/2011	10:45:21 AM	Helium MFC set to  20.000000
11/2/2011	10:45:21 AM	H2 MFC set to  0.000000
11/2/2011	10:45:21 AM	BCl3 MFC set to  0.000000
11/2/2011	10:45:21 AM	PHl3 MFC set to  0.000000
11/2/2011	10:45:21 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:45:21 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:45:21 AM	Tube furnace set to 150
11/2/2011	10:45:51 AM	Helium valve closed
11/2/2011	10:45:51 AM	H2 valve closed
11/2/2011	10:45:51 AM	BCl3 valve closed
11/2/2011	10:45:51 AM	PH3 valve closed
11/2/2011	10:45:51 AM	SiCl4 pre valve closed
11/2/2011	10:45:51 AM	SiCl4 post valve closed
11/2/2011	10:45:51 AM	Bypass valve closed
11/2/2011	10:45:51 AM	Bubbler valve closed
11/2/2011	10:45:51 AM	Main Vac valve opened
11/2/2011	10:45:51 AM	Helium MFC set to  0.000000
11/2/2011	10:45:51 AM	H2 MFC set to  0.000000
11/2/2011	10:45:51 AM	BCl3 MFC set to  0.000000
11/2/2011	10:45:51 AM	PHl3 MFC set to  0.000000
11/2/2011	10:45:51 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:45:51 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:45:51 AM	Tube furnace set to 150
11/2/2011	10:46:21 AM	H2 valve closed
11/2/2011	10:46:21 AM	BCl3 valve closed
11/2/2011	10:46:21 AM	PH3 valve closed
11/2/2011	10:46:21 AM	SiCl4 pre valve closed
11/2/2011	10:46:21 AM	SiCl4 post valve closed
11/2/2011	10:46:21 AM	Bypass valve closed
11/2/2011	10:46:21 AM	Bubbler valve closed
11/2/2011	10:46:21 AM	Helium valve opened
11/2/2011	10:46:21 AM	Main Vac valve opened
11/2/2011	10:46:21 AM	Helium MFC set to  20.000000
11/2/2011	10:46:21 AM	H2 MFC set to  0.000000
11/2/2011	10:46:21 AM	BCl3 MFC set to  0.000000
11/2/2011	10:46:21 AM	PHl3 MFC set to  0.000000
11/2/2011	10:46:21 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:46:21 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:46:21 AM	Tube furnace set to 150
11/2/2011	10:46:52 AM	Helium valve closed
11/2/2011	10:46:52 AM	H2 valve closed
11/2/2011	10:46:52 AM	BCl3 valve closed
11/2/2011	10:46:52 AM	PH3 valve closed
11/2/2011	10:46:52 AM	SiCl4 pre valve closed
11/2/2011	10:46:52 AM	SiCl4 post valve closed
11/2/2011	10:46:52 AM	Bypass valve closed
11/2/2011	10:46:52 AM	Bubbler valve closed
11/2/2011	10:46:52 AM	Main Vac valve opened
11/2/2011	10:46:52 AM	Helium MFC set to  0.000000
11/2/2011	10:46:52 AM	H2 MFC set to  0.000000
11/2/2011	10:46:52 AM	BCl3 MFC set to  0.000000
11/2/2011	10:46:52 AM	PHl3 MFC set to  0.000000
11/2/2011	10:46:52 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:46:52 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:46:52 AM	Tube furnace set to 150
11/2/2011	10:47:22 AM	H2 valve closed
11/2/2011	10:47:22 AM	BCl3 valve closed
11/2/2011	10:47:22 AM	PH3 valve closed
11/2/2011	10:47:22 AM	SiCl4 pre valve closed
11/2/2011	10:47:22 AM	SiCl4 post valve closed
11/2/2011	10:47:22 AM	Bypass valve closed
11/2/2011	10:47:22 AM	Bubbler valve closed
11/2/2011	10:47:22 AM	Helium valve opened
11/2/2011	10:47:22 AM	Main Vac valve opened
11/2/2011	10:47:22 AM	Helium MFC set to  20.000000
11/2/2011	10:47:22 AM	H2 MFC set to  0.000000
11/2/2011	10:47:22 AM	BCl3 MFC set to  0.000000
11/2/2011	10:47:22 AM	PHl3 MFC set to  0.000000
11/2/2011	10:47:22 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:47:22 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:47:22 AM	Tube furnace set to 150
11/2/2011	10:47:52 AM	Helium valve closed
11/2/2011	10:47:52 AM	H2 valve closed
11/2/2011	10:47:52 AM	BCl3 valve closed
11/2/2011	10:47:52 AM	PH3 valve closed
11/2/2011	10:47:52 AM	SiCl4 pre valve closed
11/2/2011	10:47:52 AM	SiCl4 post valve closed
11/2/2011	10:47:52 AM	Bypass valve closed
11/2/2011	10:47:52 AM	Bubbler valve closed
11/2/2011	10:47:52 AM	Main Vac valve opened
11/2/2011	10:47:52 AM	Helium MFC set to  0.000000
11/2/2011	10:47:52 AM	H2 MFC set to  0.000000
11/2/2011	10:47:52 AM	BCl3 MFC set to  0.000000
11/2/2011	10:47:52 AM	PHl3 MFC set to  0.000000
11/2/2011	10:47:52 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:47:52 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:47:52 AM	Tube furnace set to 150
11/2/2011	10:48:22 AM	H2 valve closed
11/2/2011	10:48:22 AM	BCl3 valve closed
11/2/2011	10:48:22 AM	PH3 valve closed
11/2/2011	10:48:22 AM	SiCl4 pre valve closed
11/2/2011	10:48:22 AM	SiCl4 post valve closed
11/2/2011	10:48:22 AM	Bypass valve closed
11/2/2011	10:48:22 AM	Bubbler valve closed
11/2/2011	10:48:22 AM	Helium valve opened
11/2/2011	10:48:22 AM	Main Vac valve opened
11/2/2011	10:48:22 AM	Helium MFC set to  20.000000
11/2/2011	10:48:22 AM	H2 MFC set to  0.000000
11/2/2011	10:48:22 AM	BCl3 MFC set to  0.000000
11/2/2011	10:48:22 AM	PHl3 MFC set to  0.000000
11/2/2011	10:48:22 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:48:22 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:48:22 AM	Tube furnace set to 150
11/2/2011	10:48:52 AM	Helium valve closed
11/2/2011	10:48:52 AM	H2 valve closed
11/2/2011	10:48:52 AM	BCl3 valve closed
11/2/2011	10:48:52 AM	PH3 valve closed
11/2/2011	10:48:52 AM	SiCl4 pre valve closed
11/2/2011	10:48:52 AM	SiCl4 post valve closed
11/2/2011	10:48:52 AM	Bypass valve closed
11/2/2011	10:48:52 AM	Bubbler valve closed
11/2/2011	10:48:52 AM	Main Vac valve opened
11/2/2011	10:48:52 AM	Helium MFC set to  0.000000
11/2/2011	10:48:52 AM	H2 MFC set to  0.000000
11/2/2011	10:48:52 AM	BCl3 MFC set to  0.000000
11/2/2011	10:48:52 AM	PHl3 MFC set to  0.000000
11/2/2011	10:48:52 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:48:52 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:48:53 AM	Tube furnace set to 150
11/2/2011	10:49:23 AM	H2 valve closed
11/2/2011	10:49:23 AM	BCl3 valve closed
11/2/2011	10:49:23 AM	PH3 valve closed
11/2/2011	10:49:23 AM	SiCl4 pre valve closed
11/2/2011	10:49:23 AM	SiCl4 post valve closed
11/2/2011	10:49:23 AM	Bypass valve closed
11/2/2011	10:49:23 AM	Bubbler valve closed
11/2/2011	10:49:23 AM	Helium valve opened
11/2/2011	10:49:23 AM	Main Vac valve opened
11/2/2011	10:49:23 AM	Helium MFC set to  20.000000
11/2/2011	10:49:23 AM	H2 MFC set to  0.000000
11/2/2011	10:49:23 AM	BCl3 MFC set to  0.000000
11/2/2011	10:49:23 AM	PHl3 MFC set to  0.000000
11/2/2011	10:49:23 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:49:23 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:49:23 AM	Tube furnace set to 150
11/2/2011	10:49:53 AM	Helium valve closed
11/2/2011	10:49:53 AM	H2 valve closed
11/2/2011	10:49:53 AM	BCl3 valve closed
11/2/2011	10:49:53 AM	PH3 valve closed
11/2/2011	10:49:53 AM	SiCl4 pre valve closed
11/2/2011	10:49:53 AM	SiCl4 post valve closed
11/2/2011	10:49:53 AM	Bypass valve closed
11/2/2011	10:49:53 AM	Bubbler valve closed
11/2/2011	10:49:53 AM	Main Vac valve opened
11/2/2011	10:49:53 AM	Helium MFC set to  0.000000
11/2/2011	10:49:53 AM	H2 MFC set to  0.000000
11/2/2011	10:49:53 AM	BCl3 MFC set to  0.000000
11/2/2011	10:49:53 AM	PHl3 MFC set to  0.000000
11/2/2011	10:49:53 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:49:53 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:49:53 AM	Tube furnace set to 150
11/2/2011	10:50:23 AM	H2 valve closed
11/2/2011	10:50:23 AM	BCl3 valve closed
11/2/2011	10:50:23 AM	PH3 valve closed
11/2/2011	10:50:23 AM	SiCl4 pre valve closed
11/2/2011	10:50:23 AM	SiCl4 post valve closed
11/2/2011	10:50:23 AM	Bypass valve closed
11/2/2011	10:50:23 AM	Bubbler valve closed
11/2/2011	10:50:23 AM	Helium valve opened
11/2/2011	10:50:23 AM	Main Vac valve opened
11/2/2011	10:50:23 AM	Helium MFC set to  20.000000
11/2/2011	10:50:23 AM	H2 MFC set to  0.000000
11/2/2011	10:50:23 AM	BCl3 MFC set to  0.000000
11/2/2011	10:50:23 AM	PHl3 MFC set to  0.000000
11/2/2011	10:50:23 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:50:23 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:50:23 AM	Tube furnace set to 150
11/2/2011	10:50:53 AM	Helium valve closed
11/2/2011	10:50:53 AM	H2 valve closed
11/2/2011	10:50:53 AM	BCl3 valve closed
11/2/2011	10:50:53 AM	PH3 valve closed
11/2/2011	10:50:53 AM	SiCl4 pre valve closed
11/2/2011	10:50:53 AM	SiCl4 post valve closed
11/2/2011	10:50:53 AM	Bypass valve closed
11/2/2011	10:50:53 AM	Bubbler valve closed
11/2/2011	10:50:53 AM	Main Vac valve opened
11/2/2011	10:50:53 AM	Helium MFC set to  0.000000
11/2/2011	10:50:53 AM	H2 MFC set to  0.000000
11/2/2011	10:50:53 AM	BCl3 MFC set to  0.000000
11/2/2011	10:50:53 AM	PHl3 MFC set to  0.000000
11/2/2011	10:50:53 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:50:53 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:50:53 AM	Tube furnace set to 150
11/2/2011	10:50:54 AM	Run finished at 10:50 AM
11/2/2011	10:51:23 AM	Main Vac valve closed
11/2/2011	10:51:30 AM	Main Vac valve opened
11/2/2011	10:51:37 AM	Recipe started at 10:51 AM
11/2/2011	10:51:37 AM	Helium valve closed
11/2/2011	10:51:37 AM	H2 valve closed
11/2/2011	10:51:37 AM	BCl3 valve closed
11/2/2011	10:51:37 AM	PH3 valve closed
11/2/2011	10:51:37 AM	SiCl4 pre valve closed
11/2/2011	10:51:37 AM	SiCl4 post valve closed
11/2/2011	10:51:37 AM	Bypass valve closed
11/2/2011	10:51:37 AM	Bubbler valve closed
11/2/2011	10:51:37 AM	Main Vac valve opened
11/2/2011	10:51:37 AM	Helium MFC set to  0.000000
11/2/2011	10:51:37 AM	H2 MFC set to  0.000000
11/2/2011	10:51:37 AM	BCl3 MFC set to  0.000000
11/2/2011	10:51:37 AM	PHl3 MFC set to  0.000000
11/2/2011	10:51:37 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:51:37 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:51:38 AM	Tube furnace set to 150
11/2/2011	10:51:40 AM	H2 valve closed
11/2/2011	10:51:40 AM	BCl3 valve closed
11/2/2011	10:51:40 AM	PH3 valve closed
11/2/2011	10:51:40 AM	SiCl4 pre valve closed
11/2/2011	10:51:40 AM	SiCl4 post valve closed
11/2/2011	10:51:40 AM	Bypass valve closed
11/2/2011	10:51:40 AM	Bubbler valve closed
11/2/2011	10:51:40 AM	Helium valve opened
11/2/2011	10:51:40 AM	Main Vac valve opened
11/2/2011	10:51:40 AM	Helium MFC set to  20.000000
11/2/2011	10:51:40 AM	H2 MFC set to  0.000000
11/2/2011	10:51:40 AM	BCl3 MFC set to  0.000000
11/2/2011	10:51:40 AM	PHl3 MFC set to  0.000000
11/2/2011	10:51:40 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:51:40 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:51:40 AM	Tube furnace set to 150
11/2/2011	10:52:10 AM	Helium valve closed
11/2/2011	10:52:10 AM	H2 valve closed
11/2/2011	10:52:10 AM	BCl3 valve closed
11/2/2011	10:52:10 AM	PH3 valve closed
11/2/2011	10:52:10 AM	SiCl4 pre valve closed
11/2/2011	10:52:10 AM	SiCl4 post valve closed
11/2/2011	10:52:10 AM	Bypass valve closed
11/2/2011	10:52:10 AM	Bubbler valve closed
11/2/2011	10:52:10 AM	Main Vac valve opened
11/2/2011	10:52:10 AM	Helium MFC set to  0.000000
11/2/2011	10:52:10 AM	H2 MFC set to  0.000000
11/2/2011	10:52:10 AM	BCl3 MFC set to  0.000000
11/2/2011	10:52:10 AM	PHl3 MFC set to  0.000000
11/2/2011	10:52:10 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:52:10 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:52:10 AM	Tube furnace set to 150
11/2/2011	10:52:41 AM	H2 valve closed
11/2/2011	10:52:41 AM	BCl3 valve closed
11/2/2011	10:52:41 AM	PH3 valve closed
11/2/2011	10:52:41 AM	SiCl4 pre valve closed
11/2/2011	10:52:41 AM	SiCl4 post valve closed
11/2/2011	10:52:41 AM	Bypass valve closed
11/2/2011	10:52:41 AM	Bubbler valve closed
11/2/2011	10:52:41 AM	Helium valve opened
11/2/2011	10:52:41 AM	Main Vac valve opened
11/2/2011	10:52:41 AM	Helium MFC set to  20.000000
11/2/2011	10:52:41 AM	H2 MFC set to  0.000000
11/2/2011	10:52:41 AM	BCl3 MFC set to  0.000000
11/2/2011	10:52:41 AM	PHl3 MFC set to  0.000000
11/2/2011	10:52:41 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:52:41 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:52:41 AM	Tube furnace set to 150
11/2/2011	10:53:11 AM	Helium valve closed
11/2/2011	10:53:11 AM	H2 valve closed
11/2/2011	10:53:11 AM	BCl3 valve closed
11/2/2011	10:53:11 AM	PH3 valve closed
11/2/2011	10:53:11 AM	SiCl4 pre valve closed
11/2/2011	10:53:11 AM	SiCl4 post valve closed
11/2/2011	10:53:11 AM	Bypass valve closed
11/2/2011	10:53:11 AM	Bubbler valve closed
11/2/2011	10:53:11 AM	Main Vac valve opened
11/2/2011	10:53:11 AM	Helium MFC set to  0.000000
11/2/2011	10:53:11 AM	H2 MFC set to  0.000000
11/2/2011	10:53:11 AM	BCl3 MFC set to  0.000000
11/2/2011	10:53:11 AM	PHl3 MFC set to  0.000000
11/2/2011	10:53:11 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:53:11 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:53:11 AM	Tube furnace set to 150
11/2/2011	10:53:41 AM	H2 valve closed
11/2/2011	10:53:41 AM	BCl3 valve closed
11/2/2011	10:53:41 AM	PH3 valve closed
11/2/2011	10:53:41 AM	SiCl4 pre valve closed
11/2/2011	10:53:41 AM	SiCl4 post valve closed
11/2/2011	10:53:41 AM	Bypass valve closed
11/2/2011	10:53:41 AM	Bubbler valve closed
11/2/2011	10:53:41 AM	Helium valve opened
11/2/2011	10:53:41 AM	Main Vac valve opened
11/2/2011	10:53:41 AM	Helium MFC set to  20.000000
11/2/2011	10:53:41 AM	H2 MFC set to  0.000000
11/2/2011	10:53:41 AM	BCl3 MFC set to  0.000000
11/2/2011	10:53:41 AM	PHl3 MFC set to  0.000000
11/2/2011	10:53:41 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:53:41 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:53:41 AM	Tube furnace set to 150
11/2/2011	10:54:11 AM	Helium valve closed
11/2/2011	10:54:11 AM	H2 valve closed
11/2/2011	10:54:11 AM	BCl3 valve closed
11/2/2011	10:54:11 AM	PH3 valve closed
11/2/2011	10:54:11 AM	SiCl4 pre valve closed
11/2/2011	10:54:11 AM	SiCl4 post valve closed
11/2/2011	10:54:11 AM	Bypass valve closed
11/2/2011	10:54:11 AM	Bubbler valve closed
11/2/2011	10:54:11 AM	Main Vac valve opened
11/2/2011	10:54:11 AM	Helium MFC set to  0.000000
11/2/2011	10:54:11 AM	H2 MFC set to  0.000000
11/2/2011	10:54:11 AM	BCl3 MFC set to  0.000000
11/2/2011	10:54:11 AM	PHl3 MFC set to  0.000000
11/2/2011	10:54:11 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:54:11 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:54:11 AM	Tube furnace set to 150
11/2/2011	10:54:41 AM	H2 valve closed
11/2/2011	10:54:41 AM	BCl3 valve closed
11/2/2011	10:54:41 AM	PH3 valve closed
11/2/2011	10:54:41 AM	SiCl4 pre valve closed
11/2/2011	10:54:41 AM	SiCl4 post valve closed
11/2/2011	10:54:41 AM	Bypass valve closed
11/2/2011	10:54:41 AM	Bubbler valve closed
11/2/2011	10:54:41 AM	Helium valve opened
11/2/2011	10:54:41 AM	Main Vac valve opened
11/2/2011	10:54:41 AM	Helium MFC set to  20.000000
11/2/2011	10:54:41 AM	H2 MFC set to  0.000000
11/2/2011	10:54:41 AM	BCl3 MFC set to  0.000000
11/2/2011	10:54:41 AM	PHl3 MFC set to  0.000000
11/2/2011	10:54:41 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:54:41 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:54:41 AM	Tube furnace set to 150
11/2/2011	10:55:11 AM	Helium valve closed
11/2/2011	10:55:12 AM	H2 valve closed
11/2/2011	10:55:12 AM	BCl3 valve closed
11/2/2011	10:55:12 AM	PH3 valve closed
11/2/2011	10:55:12 AM	SiCl4 pre valve closed
11/2/2011	10:55:12 AM	SiCl4 post valve closed
11/2/2011	10:55:12 AM	Bypass valve closed
11/2/2011	10:55:12 AM	Bubbler valve closed
11/2/2011	10:55:12 AM	Main Vac valve opened
11/2/2011	10:55:12 AM	Helium MFC set to  0.000000
11/2/2011	10:55:12 AM	H2 MFC set to  0.000000
11/2/2011	10:55:12 AM	BCl3 MFC set to  0.000000
11/2/2011	10:55:12 AM	PHl3 MFC set to  0.000000
11/2/2011	10:55:12 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:55:12 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:55:12 AM	Tube furnace set to 150
11/2/2011	10:55:42 AM	H2 valve closed
11/2/2011	10:55:42 AM	BCl3 valve closed
11/2/2011	10:55:42 AM	PH3 valve closed
11/2/2011	10:55:42 AM	SiCl4 pre valve closed
11/2/2011	10:55:42 AM	SiCl4 post valve closed
11/2/2011	10:55:42 AM	Bypass valve closed
11/2/2011	10:55:42 AM	Bubbler valve closed
11/2/2011	10:55:42 AM	Helium valve opened
11/2/2011	10:55:42 AM	Main Vac valve opened
11/2/2011	10:55:42 AM	Helium MFC set to  20.000000
11/2/2011	10:55:42 AM	H2 MFC set to  0.000000
11/2/2011	10:55:42 AM	BCl3 MFC set to  0.000000
11/2/2011	10:55:42 AM	PHl3 MFC set to  0.000000
11/2/2011	10:55:42 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:55:42 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:55:42 AM	Tube furnace set to 150
11/2/2011	10:56:12 AM	Helium valve closed
11/2/2011	10:56:12 AM	H2 valve closed
11/2/2011	10:56:12 AM	BCl3 valve closed
11/2/2011	10:56:12 AM	PH3 valve closed
11/2/2011	10:56:12 AM	SiCl4 pre valve closed
11/2/2011	10:56:12 AM	SiCl4 post valve closed
11/2/2011	10:56:12 AM	Bypass valve closed
11/2/2011	10:56:12 AM	Bubbler valve closed
11/2/2011	10:56:12 AM	Main Vac valve opened
11/2/2011	10:56:12 AM	Helium MFC set to  0.000000
11/2/2011	10:56:12 AM	H2 MFC set to  0.000000
11/2/2011	10:56:12 AM	BCl3 MFC set to  0.000000
11/2/2011	10:56:12 AM	PHl3 MFC set to  0.000000
11/2/2011	10:56:12 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:56:12 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:56:12 AM	Tube furnace set to 150
11/2/2011	10:56:42 AM	H2 valve closed
11/2/2011	10:56:42 AM	BCl3 valve closed
11/2/2011	10:56:42 AM	PH3 valve closed
11/2/2011	10:56:42 AM	SiCl4 pre valve closed
11/2/2011	10:56:42 AM	SiCl4 post valve closed
11/2/2011	10:56:42 AM	Bypass valve closed
11/2/2011	10:56:42 AM	Bubbler valve closed
11/2/2011	10:56:42 AM	Helium valve opened
11/2/2011	10:56:42 AM	Main Vac valve opened
11/2/2011	10:56:42 AM	Helium MFC set to  20.000000
11/2/2011	10:56:42 AM	H2 MFC set to  0.000000
11/2/2011	10:56:42 AM	BCl3 MFC set to  0.000000
11/2/2011	10:56:42 AM	PHl3 MFC set to  0.000000
11/2/2011	10:56:42 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:56:42 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:56:42 AM	Tube furnace set to 150
11/2/2011	10:57:12 AM	Helium valve closed
11/2/2011	10:57:12 AM	H2 valve closed
11/2/2011	10:57:12 AM	BCl3 valve closed
11/2/2011	10:57:12 AM	PH3 valve closed
11/2/2011	10:57:12 AM	SiCl4 pre valve closed
11/2/2011	10:57:12 AM	SiCl4 post valve closed
11/2/2011	10:57:12 AM	Bypass valve closed
11/2/2011	10:57:12 AM	Bubbler valve closed
11/2/2011	10:57:12 AM	Main Vac valve opened
11/2/2011	10:57:12 AM	Helium MFC set to  0.000000
11/2/2011	10:57:12 AM	H2 MFC set to  0.000000
11/2/2011	10:57:12 AM	BCl3 MFC set to  0.000000
11/2/2011	10:57:12 AM	PHl3 MFC set to  0.000000
11/2/2011	10:57:12 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:57:12 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:57:12 AM	Tube furnace set to 150
11/2/2011	10:57:42 AM	H2 valve closed
11/2/2011	10:57:42 AM	BCl3 valve closed
11/2/2011	10:57:42 AM	PH3 valve closed
11/2/2011	10:57:42 AM	SiCl4 pre valve closed
11/2/2011	10:57:42 AM	SiCl4 post valve closed
11/2/2011	10:57:42 AM	Bypass valve closed
11/2/2011	10:57:42 AM	Bubbler valve closed
11/2/2011	10:57:42 AM	Helium valve opened
11/2/2011	10:57:42 AM	Main Vac valve opened
11/2/2011	10:57:42 AM	Helium MFC set to  20.000000
11/2/2011	10:57:42 AM	H2 MFC set to  0.000000
11/2/2011	10:57:42 AM	BCl3 MFC set to  0.000000
11/2/2011	10:57:43 AM	PHl3 MFC set to  0.000000
11/2/2011	10:57:43 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:57:43 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:57:43 AM	Tube furnace set to 150
11/2/2011	10:58:13 AM	Helium valve closed
11/2/2011	10:58:13 AM	H2 valve closed
11/2/2011	10:58:13 AM	BCl3 valve closed
11/2/2011	10:58:13 AM	PH3 valve closed
11/2/2011	10:58:13 AM	SiCl4 pre valve closed
11/2/2011	10:58:13 AM	SiCl4 post valve closed
11/2/2011	10:58:13 AM	Bypass valve closed
11/2/2011	10:58:13 AM	Bubbler valve closed
11/2/2011	10:58:13 AM	Main Vac valve opened
11/2/2011	10:58:13 AM	Helium MFC set to  0.000000
11/2/2011	10:58:13 AM	H2 MFC set to  0.000000
11/2/2011	10:58:13 AM	BCl3 MFC set to  0.000000
11/2/2011	10:58:13 AM	PHl3 MFC set to  0.000000
11/2/2011	10:58:13 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:58:13 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:58:13 AM	Tube furnace set to 150
11/2/2011	10:58:43 AM	H2 valve closed
11/2/2011	10:58:43 AM	BCl3 valve closed
11/2/2011	10:58:43 AM	PH3 valve closed
11/2/2011	10:58:43 AM	SiCl4 pre valve closed
11/2/2011	10:58:43 AM	SiCl4 post valve closed
11/2/2011	10:58:43 AM	Bypass valve closed
11/2/2011	10:58:43 AM	Bubbler valve closed
11/2/2011	10:58:43 AM	Helium valve opened
11/2/2011	10:58:43 AM	Main Vac valve opened
11/2/2011	10:58:43 AM	Helium MFC set to  20.000000
11/2/2011	10:58:43 AM	H2 MFC set to  0.000000
11/2/2011	10:58:43 AM	BCl3 MFC set to  0.000000
11/2/2011	10:58:43 AM	PHl3 MFC set to  0.000000
11/2/2011	10:58:43 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:58:43 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:58:43 AM	Tube furnace set to 150
11/2/2011	10:59:13 AM	Helium valve closed
11/2/2011	10:59:13 AM	H2 valve closed
11/2/2011	10:59:13 AM	BCl3 valve closed
11/2/2011	10:59:13 AM	PH3 valve closed
11/2/2011	10:59:13 AM	SiCl4 pre valve closed
11/2/2011	10:59:13 AM	SiCl4 post valve closed
11/2/2011	10:59:13 AM	Bypass valve closed
11/2/2011	10:59:13 AM	Bubbler valve closed
11/2/2011	10:59:13 AM	Main Vac valve opened
11/2/2011	10:59:13 AM	Helium MFC set to  0.000000
11/2/2011	10:59:13 AM	H2 MFC set to  0.000000
11/2/2011	10:59:13 AM	BCl3 MFC set to  0.000000
11/2/2011	10:59:13 AM	PHl3 MFC set to  0.000000
11/2/2011	10:59:13 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:59:13 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:59:13 AM	Tube furnace set to 150
11/2/2011	10:59:43 AM	H2 valve closed
11/2/2011	10:59:43 AM	BCl3 valve closed
11/2/2011	10:59:43 AM	PH3 valve closed
11/2/2011	10:59:43 AM	SiCl4 pre valve closed
11/2/2011	10:59:43 AM	SiCl4 post valve closed
11/2/2011	10:59:43 AM	Bypass valve closed
11/2/2011	10:59:43 AM	Bubbler valve closed
11/2/2011	10:59:43 AM	Helium valve opened
11/2/2011	10:59:43 AM	Main Vac valve opened
11/2/2011	10:59:43 AM	Helium MFC set to  20.000000
11/2/2011	10:59:43 AM	H2 MFC set to  0.000000
11/2/2011	10:59:43 AM	BCl3 MFC set to  0.000000
11/2/2011	10:59:43 AM	PHl3 MFC set to  0.000000
11/2/2011	10:59:43 AM	SiCl4 MFC set to  0.000000
11/2/2011	10:59:43 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:59:43 AM	Tube furnace set to 150
11/2/2011	11:00:13 AM	Helium valve closed
11/2/2011	11:00:13 AM	H2 valve closed
11/2/2011	11:00:13 AM	BCl3 valve closed
11/2/2011	11:00:13 AM	PH3 valve closed
11/2/2011	11:00:13 AM	SiCl4 pre valve closed
11/2/2011	11:00:13 AM	SiCl4 post valve closed
11/2/2011	11:00:13 AM	Bypass valve closed
11/2/2011	11:00:13 AM	Bubbler valve closed
11/2/2011	11:00:13 AM	Main Vac valve opened
11/2/2011	11:00:13 AM	Helium MFC set to  0.000000
11/2/2011	11:00:13 AM	H2 MFC set to  0.000000
11/2/2011	11:00:13 AM	BCl3 MFC set to  0.000000
11/2/2011	11:00:13 AM	PHl3 MFC set to  0.000000
11/2/2011	11:00:13 AM	SiCl4 MFC set to  0.000000
11/2/2011	11:00:13 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:00:14 AM	Tube furnace set to 150
11/2/2011	11:00:44 AM	H2 valve closed
11/2/2011	11:00:44 AM	BCl3 valve closed
11/2/2011	11:00:44 AM	PH3 valve closed
11/2/2011	11:00:44 AM	SiCl4 pre valve closed
11/2/2011	11:00:44 AM	SiCl4 post valve closed
11/2/2011	11:00:44 AM	Bypass valve closed
11/2/2011	11:00:44 AM	Bubbler valve closed
11/2/2011	11:00:44 AM	Helium valve opened
11/2/2011	11:00:44 AM	Main Vac valve opened
11/2/2011	11:00:44 AM	Helium MFC set to  20.000000
11/2/2011	11:00:44 AM	H2 MFC set to  0.000000
11/2/2011	11:00:44 AM	BCl3 MFC set to  0.000000
11/2/2011	11:00:44 AM	PHl3 MFC set to  0.000000
11/2/2011	11:00:44 AM	SiCl4 MFC set to  0.000000
11/2/2011	11:00:44 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:00:44 AM	Tube furnace set to 150
11/2/2011	11:01:14 AM	Helium valve closed
11/2/2011	11:01:14 AM	H2 valve closed
11/2/2011	11:01:14 AM	BCl3 valve closed
11/2/2011	11:01:14 AM	PH3 valve closed
11/2/2011	11:01:14 AM	SiCl4 pre valve closed
11/2/2011	11:01:14 AM	SiCl4 post valve closed
11/2/2011	11:01:14 AM	Bypass valve closed
11/2/2011	11:01:14 AM	Bubbler valve closed
11/2/2011	11:01:14 AM	Main Vac valve opened
11/2/2011	11:01:14 AM	Helium MFC set to  0.000000
11/2/2011	11:01:14 AM	H2 MFC set to  0.000000
11/2/2011	11:01:14 AM	BCl3 MFC set to  0.000000
11/2/2011	11:01:14 AM	PHl3 MFC set to  0.000000
11/2/2011	11:01:14 AM	SiCl4 MFC set to  0.000000
11/2/2011	11:01:14 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:01:14 AM	Tube furnace set to 150
11/2/2011	11:01:15 AM	Run finished at 11:01 AM
11/2/2011	11:17:50 AM	Main Vac valve closed
11/2/2011	11:17:57 AM	Main Vac valve opened
11/2/2011	11:18:34 AM	Recipe started at 11:18 AM
11/2/2011	11:18:34 AM	Helium valve closed
11/2/2011	11:18:34 AM	H2 valve closed
11/2/2011	11:18:34 AM	BCl3 valve closed
11/2/2011	11:18:34 AM	PH3 valve closed
11/2/2011	11:18:34 AM	SiCl4 pre valve closed
11/2/2011	11:18:34 AM	SiCl4 post valve closed
11/2/2011	11:18:34 AM	Main Vac valve closed
11/2/2011	11:18:34 AM	Bypass valve closed
11/2/2011	11:18:34 AM	Bubbler valve closed
11/2/2011	11:18:34 AM	Helium MFC set to  0.000000
11/2/2011	11:18:34 AM	H2 MFC set to  0.000000
11/2/2011	11:18:34 AM	BCl3 MFC set to  0.000000
11/2/2011	11:18:34 AM	PHl3 MFC set to  0.000000
11/2/2011	11:18:34 AM	SiCl4 MFC set to  0.000000
11/2/2011	11:18:34 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:18:34 AM	Tube furnace set to 0
11/2/2011	11:18:37 AM	Helium valve closed
11/2/2011	11:18:37 AM	BCl3 valve closed
11/2/2011	11:18:37 AM	PH3 valve closed
11/2/2011	11:18:37 AM	SiCl4 pre valve closed
11/2/2011	11:18:37 AM	SiCl4 post valve closed
11/2/2011	11:18:37 AM	Main Vac valve closed
11/2/2011	11:18:37 AM	Bypass valve closed
11/2/2011	11:18:37 AM	Bubbler valve closed
11/2/2011	11:18:37 AM	H2 valve opened
11/2/2011	11:18:37 AM	Helium MFC set to  0.000000
11/2/2011	11:18:37 AM	H2 MFC set to  500.000000
11/2/2011	11:18:37 AM	BCl3 MFC set to  0.000000
11/2/2011	11:18:37 AM	PHl3 MFC set to  0.000000
11/2/2011	11:18:37 AM	SiCl4 MFC set to  0.000000
11/2/2011	11:18:37 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:18:37 AM	Tube furnace set to 0
11/2/2011	11:19:42 AM	Helium valve closed
11/2/2011	11:19:42 AM	BCl3 valve closed
11/2/2011	11:19:42 AM	PH3 valve closed
11/2/2011	11:19:42 AM	SiCl4 pre valve closed
11/2/2011	11:19:42 AM	SiCl4 post valve closed
11/2/2011	11:19:42 AM	Main Vac valve closed
11/2/2011	11:19:42 AM	Bypass valve closed
11/2/2011	11:19:42 AM	H2 valve opened
11/2/2011	11:19:42 AM	Bubbler valve opened
11/2/2011	11:19:42 AM	Helium MFC set to  0.000000
11/2/2011	11:19:42 AM	H2 MFC set to  500.000000
11/2/2011	11:19:42 AM	BCl3 MFC set to  0.000000
11/2/2011	11:19:42 AM	PHl3 MFC set to  0.000000
11/2/2011	11:19:42 AM	SiCl4 MFC set to  0.000000
11/2/2011	11:19:42 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:19:42 AM	Tube furnace set to 0
11/2/2011	11:19:43 AM	Helium valve closed
11/2/2011	11:19:43 AM	BCl3 valve closed
11/2/2011	11:19:43 AM	PH3 valve closed
11/2/2011	11:19:43 AM	SiCl4 pre valve closed
11/2/2011	11:19:43 AM	SiCl4 post valve closed
11/2/2011	11:19:43 AM	Main Vac valve closed
11/2/2011	11:19:43 AM	Bypass valve closed
11/2/2011	11:19:43 AM	H2 valve opened
11/2/2011	11:19:43 AM	Bubbler valve opened
11/2/2011	11:19:43 AM	Helium MFC set to  0.000000
11/2/2011	11:19:43 AM	H2 MFC set to  500.000000
11/2/2011	11:19:43 AM	BCl3 MFC set to  0.000000
11/2/2011	11:19:43 AM	PHl3 MFC set to  0.000000
11/2/2011	11:19:43 AM	SiCl4 MFC set to  0.000000
11/2/2011	11:19:43 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:19:43 AM	Tube furnace set to 1025
11/2/2011	11:39:43 AM	Helium valve closed
11/2/2011	11:39:43 AM	BCl3 valve closed
11/2/2011	11:39:43 AM	PH3 valve closed
11/2/2011	11:39:43 AM	Main Vac valve closed
11/2/2011	11:39:43 AM	Bypass valve closed
11/2/2011	11:39:43 AM	H2 valve opened
11/2/2011	11:39:43 AM	SiCl4 pre valve opened
11/2/2011	11:39:43 AM	SiCl4 post valve opened
11/2/2011	11:39:43 AM	Bubbler valve opened
11/2/2011	11:39:43 AM	Helium MFC set to  0.000000
11/2/2011	11:39:43 AM	H2 MFC set to  500.000000
11/2/2011	11:39:43 AM	BCl3 MFC set to  0.000000
11/2/2011	11:39:43 AM	PHl3 MFC set to  0.000000
11/2/2011	11:39:43 AM	SiCl4 MFC set to  50.000000
11/2/2011	11:39:43 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:39:43 AM	Tube furnace set to 1025
11/2/2011	11:59:43 AM	Helium valve closed
11/2/2011	11:59:43 AM	BCl3 valve closed
11/2/2011	11:59:43 AM	PH3 valve closed
11/2/2011	11:59:43 AM	SiCl4 pre valve closed
11/2/2011	11:59:43 AM	SiCl4 post valve closed
11/2/2011	11:59:43 AM	Main Vac valve closed
11/2/2011	11:59:43 AM	Bypass valve closed
11/2/2011	11:59:43 AM	H2 valve opened
11/2/2011	11:59:43 AM	Bubbler valve opened
11/2/2011	11:59:43 AM	Helium MFC set to  0.000000
11/2/2011	11:59:43 AM	H2 MFC set to  500.000000
11/2/2011	11:59:43 AM	BCl3 MFC set to  0.000000
11/2/2011	11:59:43 AM	PHl3 MFC set to  0.000000
11/2/2011	11:59:43 AM	SiCl4 MFC set to  0.000000
11/2/2011	11:59:43 AM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:59:43 AM	Tube furnace set to 950
11/2/2011	12:02:43 PM	H2 valve closed
11/2/2011	12:02:43 PM	BCl3 valve closed
11/2/2011	12:02:43 PM	PH3 valve closed
11/2/2011	12:02:43 PM	SiCl4 pre valve closed
11/2/2011	12:02:43 PM	SiCl4 post valve closed
11/2/2011	12:02:43 PM	Main Vac valve closed
11/2/2011	12:02:43 PM	Bypass valve closed
11/2/2011	12:02:43 PM	Helium valve opened
11/2/2011	12:02:43 PM	Bubbler valve opened
11/2/2011	12:02:43 PM	Helium MFC set to  500.000000
11/2/2011	12:02:43 PM	H2 MFC set to  0.000000
11/2/2011	12:02:43 PM	BCl3 MFC set to  0.000000
11/2/2011	12:02:43 PM	PHl3 MFC set to  0.000000
11/2/2011	12:02:43 PM	SiCl4 MFC set to  0.000000
11/2/2011	12:02:43 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	12:02:44 PM	Tube furnace set to 900
11/2/2011	12:05:44 PM	H2 valve closed
11/2/2011	12:05:44 PM	BCl3 valve closed
11/2/2011	12:05:44 PM	PH3 valve closed
11/2/2011	12:05:44 PM	SiCl4 pre valve closed
11/2/2011	12:05:44 PM	SiCl4 post valve closed
11/2/2011	12:05:44 PM	Main Vac valve closed
11/2/2011	12:05:44 PM	Bypass valve closed
11/2/2011	12:05:44 PM	Helium valve opened
11/2/2011	12:05:44 PM	Bubbler valve opened
11/2/2011	12:05:44 PM	Helium MFC set to  500.000000
11/2/2011	12:05:44 PM	H2 MFC set to  0.000000
11/2/2011	12:05:44 PM	BCl3 MFC set to  0.000000
11/2/2011	12:05:44 PM	PHl3 MFC set to  0.000000
11/2/2011	12:05:44 PM	SiCl4 MFC set to  0.000000
11/2/2011	12:05:44 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	12:05:44 PM	Tube furnace set to 850
11/2/2011	12:08:44 PM	H2 valve closed
11/2/2011	12:08:44 PM	BCl3 valve closed
11/2/2011	12:08:44 PM	PH3 valve closed
11/2/2011	12:08:44 PM	SiCl4 pre valve closed
11/2/2011	12:08:44 PM	SiCl4 post valve closed
11/2/2011	12:08:44 PM	Main Vac valve closed
11/2/2011	12:08:44 PM	Bypass valve closed
11/2/2011	12:08:44 PM	Helium valve opened
11/2/2011	12:08:44 PM	Bubbler valve opened
11/2/2011	12:08:44 PM	Helium MFC set to  500.000000
11/2/2011	12:08:44 PM	H2 MFC set to  0.000000
11/2/2011	12:08:44 PM	BCl3 MFC set to  0.000000
11/2/2011	12:08:44 PM	PHl3 MFC set to  0.000000
11/2/2011	12:08:44 PM	SiCl4 MFC set to  0.000000
11/2/2011	12:08:44 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	12:08:44 PM	Tube furnace set to 800
11/2/2011	12:11:44 PM	H2 valve closed
11/2/2011	12:11:44 PM	BCl3 valve closed
11/2/2011	12:11:44 PM	PH3 valve closed
11/2/2011	12:11:44 PM	SiCl4 pre valve closed
11/2/2011	12:11:44 PM	SiCl4 post valve closed
11/2/2011	12:11:44 PM	Main Vac valve closed
11/2/2011	12:11:44 PM	Bypass valve closed
11/2/2011	12:11:44 PM	Helium valve opened
11/2/2011	12:11:44 PM	Bubbler valve opened
11/2/2011	12:11:44 PM	Helium MFC set to  500.000000
11/2/2011	12:11:44 PM	H2 MFC set to  0.000000
11/2/2011	12:11:44 PM	BCl3 MFC set to  0.000000
11/2/2011	12:11:44 PM	PHl3 MFC set to  0.000000
11/2/2011	12:11:44 PM	SiCl4 MFC set to  0.000000
11/2/2011	12:11:44 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	12:11:44 PM	Tube furnace set to 750
11/2/2011	12:14:44 PM	H2 valve closed
11/2/2011	12:14:44 PM	BCl3 valve closed
11/2/2011	12:14:44 PM	PH3 valve closed
11/2/2011	12:14:44 PM	SiCl4 pre valve closed
11/2/2011	12:14:44 PM	SiCl4 post valve closed
11/2/2011	12:14:44 PM	Main Vac valve closed
11/2/2011	12:14:44 PM	Bypass valve closed
11/2/2011	12:14:44 PM	Helium valve opened
11/2/2011	12:14:44 PM	Bubbler valve opened
11/2/2011	12:14:44 PM	Helium MFC set to  500.000000
11/2/2011	12:14:44 PM	H2 MFC set to  0.000000
11/2/2011	12:14:44 PM	BCl3 MFC set to  0.000000
11/2/2011	12:14:44 PM	PHl3 MFC set to  0.000000
11/2/2011	12:14:44 PM	SiCl4 MFC set to  0.000000
11/2/2011	12:14:44 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	12:14:44 PM	Tube furnace set to 0
11/2/2011	12:23:51 PM	Run aborted at 12:23 PM
11/2/2011	12:23:51 PM	Helium valve closed
11/2/2011	12:23:51 PM	H2 valve closed
11/2/2011	12:23:51 PM	BCl3 valve closed
11/2/2011	12:23:51 PM	PH3 valve closed
11/2/2011	12:23:51 PM	SiCl4 pre valve closed
11/2/2011	12:23:51 PM	SiCl4 post valve closed
11/2/2011	12:23:51 PM	Bypass valve closed
11/2/2011	12:23:51 PM	Main Vac valve closed
11/2/2011	12:23:51 PM	Bubbler valve closed
11/2/2011	12:23:51 PM	Helium MFC set to  0.000000
11/2/2011	12:23:51 PM	H2 MFC set to  0.000000
11/2/2011	12:23:51 PM	BCl3 MFC set to  0.000000
11/2/2011	12:23:51 PM	PHl3 MFC set to  0.000000
11/2/2011	12:23:51 PM	SiCl4 MFC set to  0.000000
11/2/2011	12:23:52 PM	Tube furnace set to 0
11/2/2011	12:26:28 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	12:26:29 PM	Recipe started at 12:26 PM
11/2/2011	12:26:29 PM	Helium valve closed
11/2/2011	12:26:29 PM	H2 valve closed
11/2/2011	12:26:29 PM	BCl3 valve closed
11/2/2011	12:26:29 PM	PH3 valve closed
11/2/2011	12:26:29 PM	SiCl4 pre valve closed
11/2/2011	12:26:29 PM	SiCl4 post valve closed
11/2/2011	12:26:29 PM	Main Vac valve closed
11/2/2011	12:26:29 PM	Bubbler valve closed
11/2/2011	12:26:29 PM	Bypass valve opened
11/2/2011	12:26:29 PM	Helium MFC set to  0.000000
11/2/2011	12:26:29 PM	H2 MFC set to  0.000000
11/2/2011	12:26:29 PM	BCl3 MFC set to  0.000000
11/2/2011	12:26:29 PM	PHl3 MFC set to  0.000000
11/2/2011	12:26:29 PM	SiCl4 MFC set to  0.000000
11/2/2011	12:26:29 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	12:26:29 PM	Tube furnace set to 0
11/2/2011	12:27:27 PM	Helium valve closed
11/2/2011	12:27:27 PM	H2 valve closed
11/2/2011	12:27:27 PM	BCl3 valve closed
11/2/2011	12:27:27 PM	PH3 valve closed
11/2/2011	12:27:27 PM	SiCl4 pre valve closed
11/2/2011	12:27:27 PM	SiCl4 post valve closed
11/2/2011	12:27:27 PM	Main Vac valve closed
11/2/2011	12:27:27 PM	Bubbler valve closed
11/2/2011	12:27:27 PM	Bypass valve opened
11/2/2011	12:27:27 PM	Helium MFC set to  0.000000
11/2/2011	12:27:27 PM	H2 MFC set to  0.000000
11/2/2011	12:27:27 PM	BCl3 MFC set to  0.000000
11/2/2011	12:27:27 PM	PHl3 MFC set to  0.000000
11/2/2011	12:27:27 PM	SiCl4 MFC set to  0.000000
11/2/2011	12:27:27 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	12:27:27 PM	Tube furnace set to 0
11/2/2011	12:27:38 PM	Helium valve closed
11/2/2011	12:27:38 PM	H2 valve closed
11/2/2011	12:27:38 PM	BCl3 valve closed
11/2/2011	12:27:38 PM	PH3 valve closed
11/2/2011	12:27:38 PM	SiCl4 pre valve closed
11/2/2011	12:27:38 PM	SiCl4 post valve closed
11/2/2011	12:27:38 PM	Bypass valve closed
11/2/2011	12:27:38 PM	Bubbler valve closed
11/2/2011	12:27:38 PM	Main Vac valve opened
11/2/2011	12:27:38 PM	Helium MFC set to  0.000000
11/2/2011	12:27:38 PM	H2 MFC set to  0.000000
11/2/2011	12:27:38 PM	BCl3 MFC set to  0.000000
11/2/2011	12:27:38 PM	PHl3 MFC set to  0.000000
11/2/2011	12:27:38 PM	SiCl4 MFC set to  0.000000
11/2/2011	12:27:38 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	12:27:38 PM	Tube furnace set to 0
11/2/2011	12:27:39 PM	Run finished at 12:27 PM
11/2/2011	12:27:39 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	1:20:37 PM	Main Vac valve closed
11/2/2011	1:20:44 PM	Main Vac valve opened
11/2/2011	1:20:53 PM	Recipe started at 1:20 PM
11/2/2011	1:20:53 PM	Helium valve closed
11/2/2011	1:20:53 PM	H2 valve closed
11/2/2011	1:20:53 PM	BCl3 valve closed
11/2/2011	1:20:53 PM	PH3 valve closed
11/2/2011	1:20:53 PM	SiCl4 pre valve closed
11/2/2011	1:20:53 PM	SiCl4 post valve closed
11/2/2011	1:20:53 PM	Main Vac valve closed
11/2/2011	1:20:53 PM	Bypass valve closed
11/2/2011	1:20:53 PM	Bubbler valve closed
11/2/2011	1:20:53 PM	Helium MFC set to  0.000000
11/2/2011	1:20:53 PM	H2 MFC set to  0.000000
11/2/2011	1:20:53 PM	BCl3 MFC set to  0.000000
11/2/2011	1:20:53 PM	PHl3 MFC set to  0.000000
11/2/2011	1:20:53 PM	SiCl4 MFC set to  0.000000
11/2/2011	1:20:53 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	1:20:54 PM	Tube furnace set to 0
11/2/2011	1:20:57 PM	Helium valve closed
11/2/2011	1:20:57 PM	BCl3 valve closed
11/2/2011	1:20:57 PM	PH3 valve closed
11/2/2011	1:20:57 PM	SiCl4 pre valve closed
11/2/2011	1:20:57 PM	SiCl4 post valve closed
11/2/2011	1:20:57 PM	Main Vac valve closed
11/2/2011	1:20:57 PM	Bypass valve closed
11/2/2011	1:20:57 PM	Bubbler valve closed
11/2/2011	1:20:57 PM	H2 valve opened
11/2/2011	1:20:57 PM	Helium MFC set to  0.000000
11/2/2011	1:20:57 PM	H2 MFC set to  500.000000
11/2/2011	1:20:57 PM	BCl3 MFC set to  0.000000
11/2/2011	1:20:57 PM	PHl3 MFC set to  0.000000
11/2/2011	1:20:57 PM	SiCl4 MFC set to  0.000000
11/2/2011	1:20:57 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	1:20:57 PM	Tube furnace set to 0
11/2/2011	1:21:59 PM	Helium valve closed
11/2/2011	1:21:59 PM	BCl3 valve closed
11/2/2011	1:21:59 PM	PH3 valve closed
11/2/2011	1:21:59 PM	SiCl4 pre valve closed
11/2/2011	1:21:59 PM	SiCl4 post valve closed
11/2/2011	1:21:59 PM	Main Vac valve closed
11/2/2011	1:21:59 PM	Bypass valve closed
11/2/2011	1:21:59 PM	H2 valve opened
11/2/2011	1:21:59 PM	Bubbler valve opened
11/2/2011	1:21:59 PM	Helium MFC set to  0.000000
11/2/2011	1:21:59 PM	H2 MFC set to  500.000000
11/2/2011	1:21:59 PM	BCl3 MFC set to  0.000000
11/2/2011	1:21:59 PM	PHl3 MFC set to  0.000000
11/2/2011	1:21:59 PM	SiCl4 MFC set to  0.000000
11/2/2011	1:21:59 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	1:21:59 PM	Tube furnace set to 0
11/2/2011	1:22:00 PM	Helium valve closed
11/2/2011	1:22:00 PM	BCl3 valve closed
11/2/2011	1:22:00 PM	PH3 valve closed
11/2/2011	1:22:00 PM	SiCl4 pre valve closed
11/2/2011	1:22:00 PM	SiCl4 post valve closed
11/2/2011	1:22:00 PM	Main Vac valve closed
11/2/2011	1:22:00 PM	Bypass valve closed
11/2/2011	1:22:00 PM	H2 valve opened
11/2/2011	1:22:00 PM	Bubbler valve opened
11/2/2011	1:22:00 PM	Helium MFC set to  0.000000
11/2/2011	1:22:00 PM	H2 MFC set to  500.000000
11/2/2011	1:22:00 PM	BCl3 MFC set to  0.000000
11/2/2011	1:22:00 PM	PHl3 MFC set to  0.000000
11/2/2011	1:22:00 PM	SiCl4 MFC set to  0.000000
11/2/2011	1:22:00 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	1:22:01 PM	Tube furnace set to 1025
11/2/2011	1:42:01 PM	Helium valve closed
11/2/2011	1:42:01 PM	BCl3 valve closed
11/2/2011	1:42:01 PM	PH3 valve closed
11/2/2011	1:42:01 PM	Main Vac valve closed
11/2/2011	1:42:01 PM	Bypass valve closed
11/2/2011	1:42:01 PM	H2 valve opened
11/2/2011	1:42:01 PM	SiCl4 pre valve opened
11/2/2011	1:42:01 PM	SiCl4 post valve opened
11/2/2011	1:42:01 PM	Bubbler valve opened
11/2/2011	1:42:01 PM	Helium MFC set to  0.000000
11/2/2011	1:42:01 PM	H2 MFC set to  500.000000
11/2/2011	1:42:01 PM	BCl3 MFC set to  0.000000
11/2/2011	1:42:01 PM	PHl3 MFC set to  0.000000
11/2/2011	1:42:01 PM	SiCl4 MFC set to  50.000000
11/2/2011	1:42:01 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	1:42:01 PM	Tube furnace set to 1025
11/2/2011	1:50:01 PM	There was an error trying to close the Helium valve.  It remains opened. 
11/2/2011	2:02:21 PM	There was an error trying to close the H2 valve.  It remains opened. 
11/2/2011	2:02:22 PM	There was an error trying to close the BCl3 valve.  It remains opened. 
11/2/2011	2:02:22 PM	PH3 valve closed
11/2/2011	2:02:22 PM	There was an error trying to close the SiCl4 pre valve.  It remains opened. 
11/2/2011	2:02:23 PM	There was an error trying to close the SiCl4 post valve.  It remains opened. 
11/2/2011	2:02:23 PM	There was an error trying to close the Main Vac valve.  It remains opened. 
11/2/2011	2:02:24 PM	There was an error trying to close the Bubbler valve.  It remains opened. 
11/2/2011	2:02:24 PM	There was an error trying to close the Bypass valve.  It remains opened. 
11/2/2011	2:02:24 PM	Helium MFC set to  0.000000
11/2/2011	2:02:24 PM	H2 MFC set to  0.000000
11/2/2011	2:02:24 PM	BCl3 MFC set to  0.000000
11/2/2011	2:02:24 PM	PHl3 MFC set to  0.000000
11/2/2011	2:02:24 PM	SiCl4 MFC set to  0.000000
11/2/2011	2:02:24 PM	Error setting the  Bypass solenoid MFC to 760.000000
11/2/2011	2:02:25 PM	Tube furnace set to 0
11/2/2011	2:02:25 PM	Baratron reads 0.000000 Torr and NaOH valve is open.  Emergency exit.
11/2/2011	2:02:26 PM	Run aborted at 2:02 PM
11/2/2011	2:02:42 PM	There was an error trying to close the Helium valve.  It remains opened. 
11/2/2011	2:02:43 PM	There was an error trying to close the H2 valve.  It remains opened. 
11/2/2011	2:02:44 PM	There was an error trying to close the BCl3 valve.  It remains opened. 
11/2/2011	2:02:44 PM	PH3 valve closed
11/2/2011	2:02:44 PM	There was an error trying to close the SiCl4 pre valve.  It remains opened. 
11/2/2011	2:02:45 PM	There was an error trying to close the SiCl4 post valve.  It remains opened. 
11/2/2011	2:02:45 PM	There was an error trying to close the Main Vac valve.  It remains opened. 
11/2/2011	2:02:45 PM	There was an error trying to close the Bypass valve.  It remains opened. 
11/2/2011	2:02:46 PM	There was an error trying to close the Bubbler valve.  It remains opened. 
11/2/2011	2:02:46 PM	Helium MFC set to  0.000000
11/2/2011	2:02:46 PM	H2 MFC set to  0.000000
11/2/2011	2:02:46 PM	BCl3 MFC set to  0.000000
11/2/2011	2:02:46 PM	PHl3 MFC set to  0.000000
11/2/2011	2:02:46 PM	SiCl4 MFC set to  0.000000
11/2/2011	2:02:46 PM	Error setting the  Bypass solenoid MFC to 760.000000
11/2/2011	2:02:47 PM	Tube furnace set to 0
11/2/2011	2:03:34 PM	There was an error trying to close the Helium valve.  It remains opened. 
11/2/2011	2:03:36 PM	There was an error trying to close the H2 valve.  It remains opened. 
11/2/2011	2:03:36 PM	There was an error trying to close the BCl3 valve.  It remains opened. 
11/2/2011	2:03:36 PM	PH3 valve closed
11/2/2011	2:03:36 PM	There was an error trying to close the SiCl4 pre valve.  It remains opened. 
11/2/2011	2:03:37 PM	There was an error trying to close the SiCl4 post valve.  It remains opened. 
11/2/2011	2:03:37 PM	There was an error trying to close the Main Vac valve.  It remains opened. 
11/2/2011	2:03:38 PM	There was an error trying to close the Bypass valve.  It remains opened. 
11/2/2011	2:03:38 PM	There was an error trying to close the Bubbler valve.  It remains opened. 
11/2/2011	2:03:39 PM	Helium MFC set to  0.000000
11/2/2011	2:03:39 PM	H2 MFC set to  0.000000
11/2/2011	2:03:39 PM	BCl3 MFC set to  0.000000
11/2/2011	2:03:39 PM	PHl3 MFC set to  0.000000
11/2/2011	2:03:39 PM	SiCl4 MFC set to  0.000000
11/2/2011	2:03:39 PM	Error setting the  Bypass solenoid MFC to 760.000000
11/2/2011	2:03:39 PM	Tube furnace set to 0
11/2/2011	2:04:33 PM	There was an error trying to close the Helium valve.  It remains opened. 
11/2/2011	2:04:35 PM	There was an error trying to close the H2 valve.  It remains opened. 
11/2/2011	2:04:35 PM	There was an error trying to close the BCl3 valve.  It remains opened. 
11/2/2011	2:04:36 PM	PH3 valve closed
11/2/2011	2:04:36 PM	There was an error trying to close the SiCl4 pre valve.  It remains opened. 
11/2/2011	2:04:36 PM	There was an error trying to close the SiCl4 post valve.  It remains opened. 
11/2/2011	2:04:36 PM	There was an error trying to close the Main Vac valve.  It remains opened. 
11/2/2011	2:04:37 PM	There was an error trying to close the Bypass valve.  It remains opened. 
11/2/2011	2:04:37 PM	There was an error trying to close the Bubbler valve.  It remains opened. 
11/2/2011	2:04:37 PM	Helium MFC set to  0.000000
11/2/2011	2:04:37 PM	H2 MFC set to  0.000000
11/2/2011	2:04:37 PM	BCl3 MFC set to  0.000000
11/2/2011	2:04:37 PM	PHl3 MFC set to  0.000000
11/2/2011	2:04:37 PM	SiCl4 MFC set to  0.000000
11/2/2011	2:04:37 PM	Error setting the  Bypass solenoid MFC to 760.000000
11/2/2011	2:04:38 PM	Tube furnace set to 0
11/2/2011	2:06:24 PM	Helium valve closed
11/2/2011	2:06:24 PM	H2 valve closed
11/2/2011	2:06:24 PM	BCl3 valve closed
11/2/2011	2:06:24 PM	PH3 valve closed
11/2/2011	2:06:24 PM	SiCl4 pre valve closed
11/2/2011	2:06:24 PM	SiCl4 post valve closed
11/2/2011	2:06:24 PM	Main Vac valve closed
11/2/2011	2:06:24 PM	Bypass valve closed
11/2/2011	2:06:24 PM	Bubbler valve closed
11/2/2011	2:06:25 PM	Helium MFC set to  0.000000
11/2/2011	2:06:25 PM	H2 MFC set to  0.000000
11/2/2011	2:06:25 PM	BCl3 MFC set to  0.000000
11/2/2011	2:06:25 PM	PHl3 MFC set to  0.000000
11/2/2011	2:06:25 PM	SiCl4 MFC set to  0.000000
11/2/2011	2:06:25 PM	Bypass solenoid MFC set to  760.000000
11/2/2011	2:06:25 PM	Tube furnace set to 0
11/2/2011	2:06:34 PM	Helium valve opened
11/2/2011	2:06:40 PM	Helium MFC set to  500.000000
11/2/2011	2:06:46 PM	Helium valve closed
11/2/2011	2:06:55 PM	Helium valve opened
11/2/2011	2:06:57 PM	Bubbler valve opened
11/2/2011	2:17:10 PM	Bubbler valve closed
11/2/2011	2:17:11 PM	Helium valve closed
11/2/2011	2:19:39 PM	Program exited cleanly
11/2/2011	2:19:47 PM	Helium valve closed
11/2/2011	2:19:47 PM	H2 valve closed
11/2/2011	2:19:47 PM	BCl3 valve closed
11/2/2011	2:19:47 PM	PH3 valve closed
11/2/2011	2:19:47 PM	SiCl4 pre valve closed
11/2/2011	2:19:47 PM	SiCl4 post valve closed
11/2/2011	2:19:47 PM	Main Vac valve closed
11/2/2011	2:19:47 PM	Bypass valve closed
11/2/2011	2:19:47 PM	Bubbler valve closed
11/2/2011	2:19:47 PM	Helium MFC set to  0.000000
11/2/2011	2:19:47 PM	H2 MFC set to  0.000000
11/2/2011	2:19:47 PM	BCl3 MFC set to  0.000000
11/2/2011	2:19:47 PM	PHl3 MFC set to  0.000000
11/2/2011	2:19:47 PM	SiCl4 MFC set to  0.000000
11/2/2011	2:19:47 PM	Bypass solenoid MFC set to  760.000000
11/2/2011	2:19:47 PM	Tube furnace set to 0
11/2/2011	2:19:51 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	2:19:52 PM	Recipe started at 2:19 PM
11/2/2011	2:19:52 PM	Helium valve closed
11/2/2011	2:19:52 PM	H2 valve closed
11/2/2011	2:19:52 PM	BCl3 valve closed
11/2/2011	2:19:52 PM	PH3 valve closed
11/2/2011	2:19:52 PM	SiCl4 pre valve closed
11/2/2011	2:19:52 PM	SiCl4 post valve closed
11/2/2011	2:19:52 PM	Main Vac valve closed
11/2/2011	2:19:52 PM	Bubbler valve closed
11/2/2011	2:19:52 PM	Bypass valve opened
11/2/2011	2:19:52 PM	Helium MFC set to  0.000000
11/2/2011	2:19:52 PM	H2 MFC set to  0.000000
11/2/2011	2:19:52 PM	BCl3 MFC set to  0.000000
11/2/2011	2:19:52 PM	PHl3 MFC set to  0.000000
11/2/2011	2:19:52 PM	SiCl4 MFC set to  0.000000
11/2/2011	2:19:52 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	2:19:52 PM	Tube furnace set to 0
11/2/2011	2:20:51 PM	Helium valve closed
11/2/2011	2:20:51 PM	H2 valve closed
11/2/2011	2:20:51 PM	BCl3 valve closed
11/2/2011	2:20:51 PM	PH3 valve closed
11/2/2011	2:20:51 PM	SiCl4 pre valve closed
11/2/2011	2:20:51 PM	SiCl4 post valve closed
11/2/2011	2:20:51 PM	Main Vac valve closed
11/2/2011	2:20:51 PM	Bubbler valve closed
11/2/2011	2:20:51 PM	Bypass valve opened
11/2/2011	2:20:51 PM	Helium MFC set to  0.000000
11/2/2011	2:20:51 PM	H2 MFC set to  0.000000
11/2/2011	2:20:51 PM	BCl3 MFC set to  0.000000
11/2/2011	2:20:51 PM	PHl3 MFC set to  0.000000
11/2/2011	2:20:51 PM	SiCl4 MFC set to  0.000000
11/2/2011	2:20:51 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	2:20:51 PM	Tube furnace set to 0
11/2/2011	2:21:20 PM	Helium valve closed
11/2/2011	2:21:20 PM	H2 valve closed
11/2/2011	2:21:20 PM	BCl3 valve closed
11/2/2011	2:21:20 PM	PH3 valve closed
11/2/2011	2:21:20 PM	SiCl4 pre valve closed
11/2/2011	2:21:20 PM	SiCl4 post valve closed
11/2/2011	2:21:20 PM	Bypass valve closed
11/2/2011	2:21:20 PM	Bubbler valve closed
11/2/2011	2:21:20 PM	Main Vac valve opened
11/2/2011	2:21:20 PM	Helium MFC set to  0.000000
11/2/2011	2:21:20 PM	H2 MFC set to  0.000000
11/2/2011	2:21:20 PM	BCl3 MFC set to  0.000000
11/2/2011	2:21:20 PM	PHl3 MFC set to  0.000000
11/2/2011	2:21:20 PM	SiCl4 MFC set to  0.000000
11/2/2011	2:21:20 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	2:21:20 PM	Tube furnace set to 0
11/2/2011	2:21:21 PM	Run finished at 2:21 PM
11/2/2011	2:21:21 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	2:23:41 PM	Helium MFC set to  10.000000
11/2/2011	2:23:42 PM	Helium valve opened
11/2/2011	2:26:51 PM	Helium valve closed
11/2/2011	2:31:11 PM	Main Vac valve closed
11/2/2011	2:31:16 PM	Main Vac valve opened
11/2/2011	2:31:19 PM	Helium valve opened
11/2/2011	2:42:29 PM	Helium valve closed
11/2/2011	2:43:26 PM	Main Vac valve closed
11/2/2011	2:43:33 PM	Main Vac valve opened
11/2/2011	2:43:35 PM	Helium valve opened
11/2/2011	2:52:42 PM	Helium valve closed
11/2/2011	3:02:27 PM	Main Vac valve closed
11/2/2011	3:02:35 PM	Main Vac valve opened
11/2/2011	3:06:08 PM	Recipe started at 3:06 PM
11/2/2011	3:06:08 PM	Helium valve closed
11/2/2011	3:06:08 PM	H2 valve closed
11/2/2011	3:06:08 PM	BCl3 valve closed
11/2/2011	3:06:08 PM	PH3 valve closed
11/2/2011	3:06:08 PM	SiCl4 pre valve closed
11/2/2011	3:06:08 PM	SiCl4 post valve closed
11/2/2011	3:06:08 PM	Main Vac valve closed
11/2/2011	3:06:08 PM	Bypass valve closed
11/2/2011	3:06:08 PM	Bubbler valve closed
11/2/2011	3:06:08 PM	Helium MFC set to  0.000000
11/2/2011	3:06:08 PM	H2 MFC set to  0.000000
11/2/2011	3:06:08 PM	BCl3 MFC set to  0.000000
11/2/2011	3:06:08 PM	PHl3 MFC set to  0.000000
11/2/2011	3:06:08 PM	SiCl4 MFC set to  0.000000
11/2/2011	3:06:08 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	3:06:08 PM	Tube furnace set to 0
11/2/2011	3:06:11 PM	Helium valve closed
11/2/2011	3:06:11 PM	BCl3 valve closed
11/2/2011	3:06:11 PM	PH3 valve closed
11/2/2011	3:06:11 PM	SiCl4 pre valve closed
11/2/2011	3:06:11 PM	SiCl4 post valve closed
11/2/2011	3:06:11 PM	Main Vac valve closed
11/2/2011	3:06:11 PM	Bypass valve closed
11/2/2011	3:06:11 PM	Bubbler valve closed
11/2/2011	3:06:12 PM	H2 valve opened
11/2/2011	3:06:12 PM	Helium MFC set to  0.000000
11/2/2011	3:06:12 PM	H2 MFC set to  500.000000
11/2/2011	3:06:12 PM	BCl3 MFC set to  0.000000
11/2/2011	3:06:12 PM	PHl3 MFC set to  0.000000
11/2/2011	3:06:12 PM	SiCl4 MFC set to  0.000000
11/2/2011	3:06:12 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	3:06:12 PM	Tube furnace set to 0
11/2/2011	3:07:14 PM	Helium valve closed
11/2/2011	3:07:14 PM	BCl3 valve closed
11/2/2011	3:07:14 PM	PH3 valve closed
11/2/2011	3:07:14 PM	SiCl4 pre valve closed
11/2/2011	3:07:14 PM	SiCl4 post valve closed
11/2/2011	3:07:14 PM	Main Vac valve closed
11/2/2011	3:07:14 PM	Bypass valve closed
11/2/2011	3:07:14 PM	H2 valve opened
11/2/2011	3:07:14 PM	Bubbler valve opened
11/2/2011	3:07:14 PM	Helium MFC set to  0.000000
11/2/2011	3:07:14 PM	H2 MFC set to  500.000000
11/2/2011	3:07:14 PM	BCl3 MFC set to  0.000000
11/2/2011	3:07:14 PM	PHl3 MFC set to  0.000000
11/2/2011	3:07:14 PM	SiCl4 MFC set to  0.000000
11/2/2011	3:07:14 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	3:07:14 PM	Tube furnace set to 0
11/2/2011	3:07:15 PM	Helium valve closed
11/2/2011	3:07:15 PM	BCl3 valve closed
11/2/2011	3:07:15 PM	PH3 valve closed
11/2/2011	3:07:15 PM	SiCl4 pre valve closed
11/2/2011	3:07:15 PM	SiCl4 post valve closed
11/2/2011	3:07:15 PM	Main Vac valve closed
11/2/2011	3:07:15 PM	Bypass valve closed
11/2/2011	3:07:15 PM	H2 valve opened
11/2/2011	3:07:15 PM	Bubbler valve opened
11/2/2011	3:07:15 PM	Helium MFC set to  0.000000
11/2/2011	3:07:15 PM	H2 MFC set to  500.000000
11/2/2011	3:07:15 PM	BCl3 MFC set to  0.000000
11/2/2011	3:07:15 PM	PHl3 MFC set to  0.000000
11/2/2011	3:07:15 PM	SiCl4 MFC set to  0.000000
11/2/2011	3:07:15 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	3:07:15 PM	Tube furnace set to 1025
11/2/2011	3:27:15 PM	Helium valve closed
11/2/2011	3:27:15 PM	BCl3 valve closed
11/2/2011	3:27:15 PM	PH3 valve closed
11/2/2011	3:27:15 PM	Main Vac valve closed
11/2/2011	3:27:15 PM	Bypass valve closed
11/2/2011	3:27:15 PM	H2 valve opened
11/2/2011	3:27:15 PM	SiCl4 pre valve opened
11/2/2011	3:27:15 PM	SiCl4 post valve opened
11/2/2011	3:27:15 PM	Bubbler valve opened
11/2/2011	3:27:15 PM	Helium MFC set to  0.000000
11/2/2011	3:27:15 PM	H2 MFC set to  500.000000
11/2/2011	3:27:15 PM	BCl3 MFC set to  0.000000
11/2/2011	3:27:15 PM	PHl3 MFC set to  0.000000
11/2/2011	3:27:15 PM	SiCl4 MFC set to  50.000000
11/2/2011	3:27:15 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	3:27:15 PM	Tube furnace set to 1025
11/2/2011	3:47:15 PM	Helium valve closed
11/2/2011	3:47:15 PM	BCl3 valve closed
11/2/2011	3:47:15 PM	PH3 valve closed
11/2/2011	3:47:15 PM	SiCl4 pre valve closed
11/2/2011	3:47:15 PM	SiCl4 post valve closed
11/2/2011	3:47:15 PM	Main Vac valve closed
11/2/2011	3:47:15 PM	Bypass valve closed
11/2/2011	3:47:15 PM	H2 valve opened
11/2/2011	3:47:15 PM	Bubbler valve opened
11/2/2011	3:47:15 PM	Helium MFC set to  0.000000
11/2/2011	3:47:15 PM	H2 MFC set to  500.000000
11/2/2011	3:47:15 PM	BCl3 MFC set to  0.000000
11/2/2011	3:47:15 PM	PHl3 MFC set to  0.000000
11/2/2011	3:47:15 PM	SiCl4 MFC set to  0.000000
11/2/2011	3:47:15 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	3:47:16 PM	Tube furnace set to 950
11/2/2011	3:50:16 PM	H2 valve closed
11/2/2011	3:50:16 PM	BCl3 valve closed
11/2/2011	3:50:16 PM	PH3 valve closed
11/2/2011	3:50:16 PM	SiCl4 pre valve closed
11/2/2011	3:50:16 PM	SiCl4 post valve closed
11/2/2011	3:50:16 PM	Main Vac valve closed
11/2/2011	3:50:16 PM	Bypass valve closed
11/2/2011	3:50:16 PM	Helium valve opened
11/2/2011	3:50:16 PM	Bubbler valve opened
11/2/2011	3:50:16 PM	Helium MFC set to  500.000000
11/2/2011	3:50:16 PM	H2 MFC set to  0.000000
11/2/2011	3:50:16 PM	BCl3 MFC set to  0.000000
11/2/2011	3:50:16 PM	PHl3 MFC set to  0.000000
11/2/2011	3:50:16 PM	SiCl4 MFC set to  0.000000
11/2/2011	3:50:16 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	3:50:16 PM	Tube furnace set to 900
11/2/2011	3:53:16 PM	H2 valve closed
11/2/2011	3:53:16 PM	BCl3 valve closed
11/2/2011	3:53:16 PM	PH3 valve closed
11/2/2011	3:53:16 PM	SiCl4 pre valve closed
11/2/2011	3:53:16 PM	SiCl4 post valve closed
11/2/2011	3:53:16 PM	Main Vac valve closed
11/2/2011	3:53:16 PM	Bypass valve closed
11/2/2011	3:53:16 PM	Helium valve opened
11/2/2011	3:53:16 PM	Bubbler valve opened
11/2/2011	3:53:16 PM	Helium MFC set to  500.000000
11/2/2011	3:53:16 PM	H2 MFC set to  0.000000
11/2/2011	3:53:16 PM	BCl3 MFC set to  0.000000
11/2/2011	3:53:16 PM	PHl3 MFC set to  0.000000
11/2/2011	3:53:16 PM	SiCl4 MFC set to  0.000000
11/2/2011	3:53:16 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	3:53:16 PM	Tube furnace set to 850
11/2/2011	3:56:16 PM	H2 valve closed
11/2/2011	3:56:16 PM	BCl3 valve closed
11/2/2011	3:56:16 PM	PH3 valve closed
11/2/2011	3:56:16 PM	SiCl4 pre valve closed
11/2/2011	3:56:16 PM	SiCl4 post valve closed
11/2/2011	3:56:16 PM	Main Vac valve closed
11/2/2011	3:56:16 PM	Bypass valve closed
11/2/2011	3:56:16 PM	Helium valve opened
11/2/2011	3:56:16 PM	Bubbler valve opened
11/2/2011	3:56:16 PM	Helium MFC set to  500.000000
11/2/2011	3:56:16 PM	H2 MFC set to  0.000000
11/2/2011	3:56:16 PM	BCl3 MFC set to  0.000000
11/2/2011	3:56:16 PM	PHl3 MFC set to  0.000000
11/2/2011	3:56:16 PM	SiCl4 MFC set to  0.000000
11/2/2011	3:56:16 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	3:56:16 PM	Tube furnace set to 800
11/2/2011	3:59:16 PM	H2 valve closed
11/2/2011	3:59:16 PM	BCl3 valve closed
11/2/2011	3:59:16 PM	PH3 valve closed
11/2/2011	3:59:16 PM	SiCl4 pre valve closed
11/2/2011	3:59:16 PM	SiCl4 post valve closed
11/2/2011	3:59:16 PM	Main Vac valve closed
11/2/2011	3:59:16 PM	Bypass valve closed
11/2/2011	3:59:16 PM	Helium valve opened
11/2/2011	3:59:16 PM	Bubbler valve opened
11/2/2011	3:59:16 PM	Helium MFC set to  500.000000
11/2/2011	3:59:16 PM	H2 MFC set to  0.000000
11/2/2011	3:59:16 PM	BCl3 MFC set to  0.000000
11/2/2011	3:59:16 PM	PHl3 MFC set to  0.000000
11/2/2011	3:59:16 PM	SiCl4 MFC set to  0.000000
11/2/2011	3:59:16 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	3:59:16 PM	Tube furnace set to 750
11/2/2011	4:02:16 PM	H2 valve closed
11/2/2011	4:02:16 PM	BCl3 valve closed
11/2/2011	4:02:16 PM	PH3 valve closed
11/2/2011	4:02:16 PM	SiCl4 pre valve closed
11/2/2011	4:02:16 PM	SiCl4 post valve closed
11/2/2011	4:02:16 PM	Main Vac valve closed
11/2/2011	4:02:16 PM	Bypass valve closed
11/2/2011	4:02:16 PM	Helium valve opened
11/2/2011	4:02:16 PM	Bubbler valve opened
11/2/2011	4:02:16 PM	Helium MFC set to  500.000000
11/2/2011	4:02:16 PM	H2 MFC set to  0.000000
11/2/2011	4:02:16 PM	BCl3 MFC set to  0.000000
11/2/2011	4:02:16 PM	PHl3 MFC set to  0.000000
11/2/2011	4:02:16 PM	SiCl4 MFC set to  0.000000
11/2/2011	4:02:16 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	4:02:17 PM	Tube furnace set to 0
11/2/2011	4:22:17 PM	Helium valve closed
11/2/2011	4:22:17 PM	H2 valve closed
11/2/2011	4:22:17 PM	BCl3 valve closed
11/2/2011	4:22:17 PM	PH3 valve closed
11/2/2011	4:22:17 PM	SiCl4 pre valve closed
11/2/2011	4:22:17 PM	SiCl4 post valve closed
11/2/2011	4:22:17 PM	Main Vac valve closed
11/2/2011	4:22:17 PM	Bypass valve closed
11/2/2011	4:22:17 PM	Bubbler valve closed
11/2/2011	4:22:17 PM	Helium MFC set to  0.000000
11/2/2011	4:22:17 PM	H2 MFC set to  0.000000
11/2/2011	4:22:17 PM	BCl3 MFC set to  0.000000
11/2/2011	4:22:17 PM	PHl3 MFC set to  0.000000
11/2/2011	4:22:17 PM	SiCl4 MFC set to  0.000000
11/2/2011	4:22:17 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	4:22:17 PM	Tube furnace set to 0
11/2/2011	4:22:18 PM	Run finished at 4:22 PM
11/2/2011	4:52:54 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	4:52:55 PM	Recipe started at 4:52 PM
11/2/2011	4:52:55 PM	Helium valve closed
11/2/2011	4:52:55 PM	H2 valve closed
11/2/2011	4:52:55 PM	BCl3 valve closed
11/2/2011	4:52:55 PM	PH3 valve closed
11/2/2011	4:52:55 PM	SiCl4 pre valve closed
11/2/2011	4:52:55 PM	SiCl4 post valve closed
11/2/2011	4:52:55 PM	Main Vac valve closed
11/2/2011	4:52:55 PM	Bubbler valve closed
11/2/2011	4:52:55 PM	Bypass valve opened
11/2/2011	4:52:55 PM	Helium MFC set to  0.000000
11/2/2011	4:52:55 PM	H2 MFC set to  0.000000
11/2/2011	4:52:55 PM	BCl3 MFC set to  0.000000
11/2/2011	4:52:55 PM	PHl3 MFC set to  0.000000
11/2/2011	4:52:55 PM	SiCl4 MFC set to  0.000000
11/2/2011	4:52:55 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	4:52:55 PM	Tube furnace set to 0
11/2/2011	4:53:52 PM	Helium valve closed
11/2/2011	4:53:52 PM	H2 valve closed
11/2/2011	4:53:52 PM	BCl3 valve closed
11/2/2011	4:53:52 PM	PH3 valve closed
11/2/2011	4:53:52 PM	SiCl4 pre valve closed
11/2/2011	4:53:52 PM	SiCl4 post valve closed
11/2/2011	4:53:52 PM	Main Vac valve closed
11/2/2011	4:53:52 PM	Bubbler valve closed
11/2/2011	4:53:52 PM	Bypass valve opened
11/2/2011	4:53:52 PM	Helium MFC set to  0.000000
11/2/2011	4:53:52 PM	H2 MFC set to  0.000000
11/2/2011	4:53:52 PM	BCl3 MFC set to  0.000000
11/2/2011	4:53:52 PM	PHl3 MFC set to  0.000000
11/2/2011	4:53:52 PM	SiCl4 MFC set to  0.000000
11/2/2011	4:53:52 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	4:53:52 PM	Tube furnace set to 0
11/2/2011	4:54:18 PM	Helium valve closed
11/2/2011	4:54:18 PM	H2 valve closed
11/2/2011	4:54:18 PM	BCl3 valve closed
11/2/2011	4:54:18 PM	PH3 valve closed
11/2/2011	4:54:18 PM	SiCl4 pre valve closed
11/2/2011	4:54:18 PM	SiCl4 post valve closed
11/2/2011	4:54:18 PM	Bypass valve closed
11/2/2011	4:54:18 PM	Bubbler valve closed
11/2/2011	4:54:18 PM	Main Vac valve opened
11/2/2011	4:54:18 PM	Helium MFC set to  0.000000
11/2/2011	4:54:18 PM	H2 MFC set to  0.000000
11/2/2011	4:54:18 PM	BCl3 MFC set to  0.000000
11/2/2011	4:54:18 PM	PHl3 MFC set to  0.000000
11/2/2011	4:54:18 PM	SiCl4 MFC set to  0.000000
11/2/2011	4:54:18 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	4:54:18 PM	Tube furnace set to 0
11/2/2011	4:54:19 PM	Run finished at 4:54 PM
11/2/2011	4:54:19 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	5:03:47 PM	Helium MFC set to  20.000000
11/2/2011	5:03:48 PM	Helium valve opened
11/2/2011	5:11:00 PM	Helium valve closed
11/2/2011	5:56:55 PM	Recipe started at 5:56 PM
11/2/2011	5:56:55 PM	Helium valve closed
11/2/2011	5:56:55 PM	H2 valve closed
11/2/2011	5:56:55 PM	BCl3 valve closed
11/2/2011	5:56:55 PM	PH3 valve closed
11/2/2011	5:56:55 PM	SiCl4 pre valve closed
11/2/2011	5:56:55 PM	SiCl4 post valve closed
11/2/2011	5:56:55 PM	Main Vac valve closed
11/2/2011	5:56:55 PM	Bypass valve closed
11/2/2011	5:56:55 PM	Bubbler valve closed
11/2/2011	5:56:55 PM	Helium MFC set to  0.000000
11/2/2011	5:56:55 PM	H2 MFC set to  0.000000
11/2/2011	5:56:55 PM	BCl3 MFC set to  0.000000
11/2/2011	5:56:55 PM	PHl3 MFC set to  0.000000
11/2/2011	5:56:55 PM	SiCl4 MFC set to  0.000000
11/2/2011	5:56:55 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	5:56:55 PM	Tube furnace set to 0
11/2/2011	5:56:58 PM	Helium valve closed
11/2/2011	5:56:58 PM	BCl3 valve closed
11/2/2011	5:56:58 PM	PH3 valve closed
11/2/2011	5:56:58 PM	SiCl4 pre valve closed
11/2/2011	5:56:58 PM	SiCl4 post valve closed
11/2/2011	5:56:58 PM	Main Vac valve closed
11/2/2011	5:56:58 PM	Bypass valve closed
11/2/2011	5:56:58 PM	Bubbler valve closed
11/2/2011	5:56:58 PM	H2 valve opened
11/2/2011	5:56:58 PM	Helium MFC set to  0.000000
11/2/2011	5:56:58 PM	H2 MFC set to  500.000000
11/2/2011	5:56:58 PM	BCl3 MFC set to  0.000000
11/2/2011	5:56:58 PM	PHl3 MFC set to  0.000000
11/2/2011	5:56:58 PM	SiCl4 MFC set to  0.000000
11/2/2011	5:56:58 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	5:56:59 PM	Tube furnace set to 0
11/2/2011	5:58:02 PM	Helium valve closed
11/2/2011	5:58:02 PM	BCl3 valve closed
11/2/2011	5:58:02 PM	PH3 valve closed
11/2/2011	5:58:02 PM	SiCl4 pre valve closed
11/2/2011	5:58:02 PM	SiCl4 post valve closed
11/2/2011	5:58:02 PM	Main Vac valve closed
11/2/2011	5:58:02 PM	Bypass valve closed
11/2/2011	5:58:02 PM	H2 valve opened
11/2/2011	5:58:02 PM	Bubbler valve opened
11/2/2011	5:58:02 PM	Helium MFC set to  0.000000
11/2/2011	5:58:02 PM	H2 MFC set to  500.000000
11/2/2011	5:58:02 PM	BCl3 MFC set to  0.000000
11/2/2011	5:58:02 PM	PHl3 MFC set to  0.000000
11/2/2011	5:58:02 PM	SiCl4 MFC set to  0.000000
11/2/2011	5:58:02 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	5:58:03 PM	Tube furnace set to 0
11/2/2011	5:58:04 PM	Helium valve closed
11/2/2011	5:58:04 PM	BCl3 valve closed
11/2/2011	5:58:04 PM	PH3 valve closed
11/2/2011	5:58:04 PM	SiCl4 pre valve closed
11/2/2011	5:58:04 PM	SiCl4 post valve closed
11/2/2011	5:58:04 PM	Main Vac valve closed
11/2/2011	5:58:04 PM	Bypass valve closed
11/2/2011	5:58:04 PM	H2 valve opened
11/2/2011	5:58:04 PM	Bubbler valve opened
11/2/2011	5:58:04 PM	Helium MFC set to  0.000000
11/2/2011	5:58:04 PM	H2 MFC set to  500.000000
11/2/2011	5:58:04 PM	BCl3 MFC set to  0.000000
11/2/2011	5:58:04 PM	PHl3 MFC set to  0.000000
11/2/2011	5:58:04 PM	SiCl4 MFC set to  0.000000
11/2/2011	5:58:04 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	5:58:04 PM	Tube furnace set to 1025
11/2/2011	6:18:04 PM	Helium valve closed
11/2/2011	6:18:04 PM	BCl3 valve closed
11/2/2011	6:18:04 PM	PH3 valve closed
11/2/2011	6:18:04 PM	Main Vac valve closed
11/2/2011	6:18:04 PM	Bypass valve closed
11/2/2011	6:18:04 PM	H2 valve opened
11/2/2011	6:18:04 PM	SiCl4 pre valve opened
11/2/2011	6:18:04 PM	SiCl4 post valve opened
11/2/2011	6:18:04 PM	Bubbler valve opened
11/2/2011	6:18:04 PM	Helium MFC set to  0.000000
11/2/2011	6:18:04 PM	H2 MFC set to  500.000000
11/2/2011	6:18:04 PM	BCl3 MFC set to  0.000000
11/2/2011	6:18:04 PM	PHl3 MFC set to  0.000000
11/2/2011	6:18:04 PM	SiCl4 MFC set to  50.000000
11/2/2011	6:18:04 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	6:18:04 PM	Tube furnace set to 1025
11/2/2011	6:38:04 PM	Helium valve closed
11/2/2011	6:38:04 PM	BCl3 valve closed
11/2/2011	6:38:04 PM	PH3 valve closed
11/2/2011	6:38:04 PM	SiCl4 pre valve closed
11/2/2011	6:38:04 PM	SiCl4 post valve closed
11/2/2011	6:38:04 PM	Main Vac valve closed
11/2/2011	6:38:04 PM	Bypass valve closed
11/2/2011	6:38:04 PM	H2 valve opened
11/2/2011	6:38:04 PM	Bubbler valve opened
11/2/2011	6:38:04 PM	Helium MFC set to  0.000000
11/2/2011	6:38:04 PM	H2 MFC set to  500.000000
11/2/2011	6:38:04 PM	BCl3 MFC set to  0.000000
11/2/2011	6:38:04 PM	PHl3 MFC set to  0.000000
11/2/2011	6:38:04 PM	SiCl4 MFC set to  0.000000
11/2/2011	6:38:04 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	6:38:04 PM	Tube furnace set to 950
11/2/2011	6:41:04 PM	H2 valve closed
11/2/2011	6:41:04 PM	BCl3 valve closed
11/2/2011	6:41:04 PM	PH3 valve closed
11/2/2011	6:41:04 PM	SiCl4 pre valve closed
11/2/2011	6:41:04 PM	SiCl4 post valve closed
11/2/2011	6:41:04 PM	Main Vac valve closed
11/2/2011	6:41:04 PM	Bypass valve closed
11/2/2011	6:41:04 PM	Helium valve opened
11/2/2011	6:41:04 PM	Bubbler valve opened
11/2/2011	6:41:04 PM	Helium MFC set to  500.000000
11/2/2011	6:41:04 PM	H2 MFC set to  0.000000
11/2/2011	6:41:04 PM	BCl3 MFC set to  0.000000
11/2/2011	6:41:04 PM	PHl3 MFC set to  0.000000
11/2/2011	6:41:04 PM	SiCl4 MFC set to  0.000000
11/2/2011	6:41:04 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	6:41:04 PM	Tube furnace set to 900
11/2/2011	6:44:04 PM	H2 valve closed
11/2/2011	6:44:04 PM	BCl3 valve closed
11/2/2011	6:44:04 PM	PH3 valve closed
11/2/2011	6:44:04 PM	SiCl4 pre valve closed
11/2/2011	6:44:04 PM	SiCl4 post valve closed
11/2/2011	6:44:04 PM	Main Vac valve closed
11/2/2011	6:44:04 PM	Bypass valve closed
11/2/2011	6:44:04 PM	Helium valve opened
11/2/2011	6:44:04 PM	Bubbler valve opened
11/2/2011	6:44:04 PM	Helium MFC set to  500.000000
11/2/2011	6:44:04 PM	H2 MFC set to  0.000000
11/2/2011	6:44:04 PM	BCl3 MFC set to  0.000000
11/2/2011	6:44:04 PM	PHl3 MFC set to  0.000000
11/2/2011	6:44:04 PM	SiCl4 MFC set to  0.000000
11/2/2011	6:44:04 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	6:44:04 PM	Tube furnace set to 850
11/2/2011	6:47:04 PM	H2 valve closed
11/2/2011	6:47:04 PM	BCl3 valve closed
11/2/2011	6:47:04 PM	PH3 valve closed
11/2/2011	6:47:04 PM	SiCl4 pre valve closed
11/2/2011	6:47:04 PM	SiCl4 post valve closed
11/2/2011	6:47:04 PM	Main Vac valve closed
11/2/2011	6:47:04 PM	Bypass valve closed
11/2/2011	6:47:04 PM	Helium valve opened
11/2/2011	6:47:04 PM	Bubbler valve opened
11/2/2011	6:47:04 PM	Helium MFC set to  500.000000
11/2/2011	6:47:04 PM	H2 MFC set to  0.000000
11/2/2011	6:47:04 PM	BCl3 MFC set to  0.000000
11/2/2011	6:47:04 PM	PHl3 MFC set to  0.000000
11/2/2011	6:47:04 PM	SiCl4 MFC set to  0.000000
11/2/2011	6:47:04 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	6:47:05 PM	Tube furnace set to 800
11/2/2011	6:50:05 PM	H2 valve closed
11/2/2011	6:50:05 PM	BCl3 valve closed
11/2/2011	6:50:05 PM	PH3 valve closed
11/2/2011	6:50:05 PM	SiCl4 pre valve closed
11/2/2011	6:50:05 PM	SiCl4 post valve closed
11/2/2011	6:50:05 PM	Main Vac valve closed
11/2/2011	6:50:05 PM	Bypass valve closed
11/2/2011	6:50:05 PM	Helium valve opened
11/2/2011	6:50:05 PM	Bubbler valve opened
11/2/2011	6:50:05 PM	Helium MFC set to  500.000000
11/2/2011	6:50:05 PM	H2 MFC set to  0.000000
11/2/2011	6:50:05 PM	BCl3 MFC set to  0.000000
11/2/2011	6:50:05 PM	PHl3 MFC set to  0.000000
11/2/2011	6:50:05 PM	SiCl4 MFC set to  0.000000
11/2/2011	6:50:05 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	6:50:05 PM	Tube furnace set to 750
11/2/2011	6:53:05 PM	H2 valve closed
11/2/2011	6:53:05 PM	BCl3 valve closed
11/2/2011	6:53:05 PM	PH3 valve closed
11/2/2011	6:53:05 PM	SiCl4 pre valve closed
11/2/2011	6:53:05 PM	SiCl4 post valve closed
11/2/2011	6:53:05 PM	Main Vac valve closed
11/2/2011	6:53:05 PM	Bypass valve closed
11/2/2011	6:53:05 PM	Helium valve opened
11/2/2011	6:53:05 PM	Bubbler valve opened
11/2/2011	6:53:05 PM	Helium MFC set to  500.000000
11/2/2011	6:53:05 PM	H2 MFC set to  0.000000
11/2/2011	6:53:05 PM	BCl3 MFC set to  0.000000
11/2/2011	6:53:05 PM	PHl3 MFC set to  0.000000
11/2/2011	6:53:05 PM	SiCl4 MFC set to  0.000000
11/2/2011	6:53:05 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	6:53:05 PM	Tube furnace set to 0
11/2/2011	7:13:05 PM	Helium valve closed
11/2/2011	7:13:05 PM	H2 valve closed
11/2/2011	7:13:05 PM	BCl3 valve closed
11/2/2011	7:13:05 PM	PH3 valve closed
11/2/2011	7:13:05 PM	SiCl4 pre valve closed
11/2/2011	7:13:05 PM	SiCl4 post valve closed
11/2/2011	7:13:05 PM	Main Vac valve closed
11/2/2011	7:13:05 PM	Bypass valve closed
11/2/2011	7:13:05 PM	Bubbler valve closed
11/2/2011	7:13:05 PM	Helium MFC set to  0.000000
11/2/2011	7:13:05 PM	H2 MFC set to  0.000000
11/2/2011	7:13:05 PM	BCl3 MFC set to  0.000000
11/2/2011	7:13:05 PM	PHl3 MFC set to  0.000000
11/2/2011	7:13:05 PM	SiCl4 MFC set to  0.000000
11/2/2011	7:13:05 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	7:13:05 PM	Tube furnace set to 0
11/2/2011	7:13:06 PM	Run finished at 7:13 PM
11/2/2011	7:18:50 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	7:18:50 PM	Recipe started at 7:18 PM
11/2/2011	7:18:51 PM	Helium valve closed
11/2/2011	7:18:51 PM	H2 valve closed
11/2/2011	7:18:51 PM	BCl3 valve closed
11/2/2011	7:18:51 PM	PH3 valve closed
11/2/2011	7:18:51 PM	SiCl4 pre valve closed
11/2/2011	7:18:51 PM	SiCl4 post valve closed
11/2/2011	7:18:51 PM	Main Vac valve closed
11/2/2011	7:18:51 PM	Bubbler valve closed
11/2/2011	7:18:51 PM	Bypass valve opened
11/2/2011	7:18:51 PM	Helium MFC set to  0.000000
11/2/2011	7:18:51 PM	H2 MFC set to  0.000000
11/2/2011	7:18:51 PM	BCl3 MFC set to  0.000000
11/2/2011	7:18:51 PM	PHl3 MFC set to  0.000000
11/2/2011	7:18:51 PM	SiCl4 MFC set to  0.000000
11/2/2011	7:18:51 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	7:18:51 PM	Tube furnace set to 0
11/2/2011	7:19:44 PM	Helium valve closed
11/2/2011	7:19:44 PM	H2 valve closed
11/2/2011	7:19:44 PM	BCl3 valve closed
11/2/2011	7:19:44 PM	PH3 valve closed
11/2/2011	7:19:44 PM	SiCl4 pre valve closed
11/2/2011	7:19:44 PM	SiCl4 post valve closed
11/2/2011	7:19:44 PM	Main Vac valve closed
11/2/2011	7:19:44 PM	Bubbler valve closed
11/2/2011	7:19:44 PM	Bypass valve opened
11/2/2011	7:19:44 PM	Helium MFC set to  0.000000
11/2/2011	7:19:44 PM	H2 MFC set to  0.000000
11/2/2011	7:19:44 PM	BCl3 MFC set to  0.000000
11/2/2011	7:19:44 PM	PHl3 MFC set to  0.000000
11/2/2011	7:19:44 PM	SiCl4 MFC set to  0.000000
11/2/2011	7:19:44 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	7:19:44 PM	Tube furnace set to 0
11/2/2011	7:20:44 PM	Helium valve closed
11/2/2011	7:20:44 PM	H2 valve closed
11/2/2011	7:20:44 PM	BCl3 valve closed
11/2/2011	7:20:44 PM	PH3 valve closed
11/2/2011	7:20:44 PM	SiCl4 pre valve closed
11/2/2011	7:20:44 PM	SiCl4 post valve closed
11/2/2011	7:20:44 PM	Bypass valve closed
11/2/2011	7:20:44 PM	Bubbler valve closed
11/2/2011	7:20:44 PM	Main Vac valve opened
11/2/2011	7:20:44 PM	Helium MFC set to  0.000000
11/2/2011	7:20:44 PM	H2 MFC set to  0.000000
11/2/2011	7:20:44 PM	BCl3 MFC set to  0.000000
11/2/2011	7:20:44 PM	PHl3 MFC set to  0.000000
11/2/2011	7:20:44 PM	SiCl4 MFC set to  0.000000
11/2/2011	7:20:44 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	7:20:45 PM	Tube furnace set to 0
11/2/2011	7:20:46 PM	Run finished at 7:20 PM
11/2/2011	7:20:46 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	7:24:17 PM	Helium MFC set to  10.000000
11/2/2011	7:24:19 PM	Helium valve opened
11/2/2011	7:25:30 PM	Helium valve closed
11/2/2011	7:26:00 PM	Recipe started at 7:25 PM
11/2/2011	7:26:00 PM	Helium valve closed
11/2/2011	7:26:00 PM	H2 valve closed
11/2/2011	7:26:00 PM	BCl3 valve closed
11/2/2011	7:26:00 PM	PH3 valve closed
11/2/2011	7:26:00 PM	SiCl4 pre valve closed
11/2/2011	7:26:00 PM	SiCl4 post valve closed
11/2/2011	7:26:00 PM	Bypass valve closed
11/2/2011	7:26:00 PM	Bubbler valve closed
11/2/2011	7:26:00 PM	Main Vac valve opened
11/2/2011	7:26:00 PM	Helium MFC set to  0.000000
11/2/2011	7:26:00 PM	H2 MFC set to  0.000000
11/2/2011	7:26:00 PM	BCl3 MFC set to  0.000000
11/2/2011	7:26:00 PM	PHl3 MFC set to  0.000000
11/2/2011	7:26:00 PM	SiCl4 MFC set to  0.000000
11/2/2011	7:26:00 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	7:26:00 PM	Tube furnace set to 0
11/2/2011	8:01:00 PM	Helium valve closed
11/2/2011	8:01:00 PM	H2 valve closed
11/2/2011	8:01:00 PM	BCl3 valve closed
11/2/2011	8:01:00 PM	PH3 valve closed
11/2/2011	8:01:00 PM	SiCl4 pre valve closed
11/2/2011	8:01:00 PM	SiCl4 post valve closed
11/2/2011	8:01:00 PM	Main Vac valve closed
11/2/2011	8:01:00 PM	Bypass valve closed
11/2/2011	8:01:00 PM	Bubbler valve closed
11/2/2011	8:01:00 PM	Helium MFC set to  0.000000
11/2/2011	8:01:00 PM	H2 MFC set to  0.000000
11/2/2011	8:01:00 PM	BCl3 MFC set to  0.000000
11/2/2011	8:01:00 PM	PHl3 MFC set to  0.000000
11/2/2011	8:01:00 PM	SiCl4 MFC set to  0.000000
11/2/2011	8:01:00 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:01:01 PM	Tube furnace set to 0
11/2/2011	8:01:04 PM	Helium valve closed
11/2/2011	8:01:04 PM	BCl3 valve closed
11/2/2011	8:01:04 PM	PH3 valve closed
11/2/2011	8:01:04 PM	SiCl4 pre valve closed
11/2/2011	8:01:04 PM	SiCl4 post valve closed
11/2/2011	8:01:04 PM	Main Vac valve closed
11/2/2011	8:01:04 PM	Bypass valve closed
11/2/2011	8:01:04 PM	Bubbler valve closed
11/2/2011	8:01:04 PM	H2 valve opened
11/2/2011	8:01:04 PM	Helium MFC set to  0.000000
11/2/2011	8:01:04 PM	H2 MFC set to  500.000000
11/2/2011	8:01:04 PM	BCl3 MFC set to  0.000000
11/2/2011	8:01:04 PM	PHl3 MFC set to  0.000000
11/2/2011	8:01:04 PM	SiCl4 MFC set to  0.000000
11/2/2011	8:01:04 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:01:04 PM	Tube furnace set to 0
11/2/2011	8:02:05 PM	Helium valve closed
11/2/2011	8:02:05 PM	BCl3 valve closed
11/2/2011	8:02:05 PM	PH3 valve closed
11/2/2011	8:02:05 PM	SiCl4 pre valve closed
11/2/2011	8:02:05 PM	SiCl4 post valve closed
11/2/2011	8:02:05 PM	Main Vac valve closed
11/2/2011	8:02:05 PM	Bypass valve closed
11/2/2011	8:02:06 PM	H2 valve opened
11/2/2011	8:02:06 PM	Bubbler valve opened
11/2/2011	8:02:06 PM	Helium MFC set to  0.000000
11/2/2011	8:02:06 PM	H2 MFC set to  500.000000
11/2/2011	8:02:06 PM	BCl3 MFC set to  0.000000
11/2/2011	8:02:06 PM	PHl3 MFC set to  0.000000
11/2/2011	8:02:06 PM	SiCl4 MFC set to  0.000000
11/2/2011	8:02:06 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:02:06 PM	Tube furnace set to 0
11/2/2011	8:02:07 PM	Helium valve closed
11/2/2011	8:02:07 PM	BCl3 valve closed
11/2/2011	8:02:07 PM	PH3 valve closed
11/2/2011	8:02:07 PM	SiCl4 pre valve closed
11/2/2011	8:02:07 PM	SiCl4 post valve closed
11/2/2011	8:02:07 PM	Main Vac valve closed
11/2/2011	8:02:07 PM	Bypass valve closed
11/2/2011	8:02:07 PM	H2 valve opened
11/2/2011	8:02:07 PM	Bubbler valve opened
11/2/2011	8:02:07 PM	Helium MFC set to  0.000000
11/2/2011	8:02:07 PM	H2 MFC set to  500.000000
11/2/2011	8:02:07 PM	BCl3 MFC set to  0.000000
11/2/2011	8:02:07 PM	PHl3 MFC set to  0.000000
11/2/2011	8:02:07 PM	SiCl4 MFC set to  0.000000
11/2/2011	8:02:07 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:02:07 PM	Tube furnace set to 1025
11/2/2011	8:22:07 PM	Helium valve closed
11/2/2011	8:22:07 PM	BCl3 valve closed
11/2/2011	8:22:07 PM	PH3 valve closed
11/2/2011	8:22:07 PM	Main Vac valve closed
11/2/2011	8:22:07 PM	Bypass valve closed
11/2/2011	8:22:07 PM	H2 valve opened
11/2/2011	8:22:07 PM	SiCl4 pre valve opened
11/2/2011	8:22:07 PM	SiCl4 post valve opened
11/2/2011	8:22:07 PM	Bubbler valve opened
11/2/2011	8:22:07 PM	Helium MFC set to  0.000000
11/2/2011	8:22:07 PM	H2 MFC set to  500.000000
11/2/2011	8:22:07 PM	BCl3 MFC set to  0.000000
11/2/2011	8:22:07 PM	PHl3 MFC set to  0.000000
11/2/2011	8:22:07 PM	SiCl4 MFC set to  50.000000
11/2/2011	8:22:07 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:22:07 PM	Tube furnace set to 1025
11/2/2011	8:42:07 PM	Helium valve closed
11/2/2011	8:42:07 PM	BCl3 valve closed
11/2/2011	8:42:07 PM	PH3 valve closed
11/2/2011	8:42:07 PM	SiCl4 pre valve closed
11/2/2011	8:42:07 PM	SiCl4 post valve closed
11/2/2011	8:42:07 PM	Main Vac valve closed
11/2/2011	8:42:07 PM	Bypass valve closed
11/2/2011	8:42:07 PM	H2 valve opened
11/2/2011	8:42:07 PM	Bubbler valve opened
11/2/2011	8:42:07 PM	Helium MFC set to  0.000000
11/2/2011	8:42:07 PM	H2 MFC set to  500.000000
11/2/2011	8:42:07 PM	BCl3 MFC set to  0.000000
11/2/2011	8:42:07 PM	PHl3 MFC set to  0.000000
11/2/2011	8:42:07 PM	SiCl4 MFC set to  0.000000
11/2/2011	8:42:07 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:42:07 PM	Tube furnace set to 950
11/2/2011	8:45:07 PM	H2 valve closed
11/2/2011	8:45:07 PM	BCl3 valve closed
11/2/2011	8:45:07 PM	PH3 valve closed
11/2/2011	8:45:07 PM	SiCl4 pre valve closed
11/2/2011	8:45:07 PM	SiCl4 post valve closed
11/2/2011	8:45:07 PM	Main Vac valve closed
11/2/2011	8:45:07 PM	Bypass valve closed
11/2/2011	8:45:07 PM	Helium valve opened
11/2/2011	8:45:07 PM	Bubbler valve opened
11/2/2011	8:45:07 PM	Helium MFC set to  500.000000
11/2/2011	8:45:07 PM	H2 MFC set to  0.000000
11/2/2011	8:45:07 PM	BCl3 MFC set to  0.000000
11/2/2011	8:45:07 PM	PHl3 MFC set to  0.000000
11/2/2011	8:45:07 PM	SiCl4 MFC set to  0.000000
11/2/2011	8:45:07 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:45:07 PM	Tube furnace set to 900
11/2/2011	8:48:07 PM	H2 valve closed
11/2/2011	8:48:07 PM	BCl3 valve closed
11/2/2011	8:48:07 PM	PH3 valve closed
11/2/2011	8:48:07 PM	SiCl4 pre valve closed
11/2/2011	8:48:07 PM	SiCl4 post valve closed
11/2/2011	8:48:07 PM	Main Vac valve closed
11/2/2011	8:48:07 PM	Bypass valve closed
11/2/2011	8:48:07 PM	Helium valve opened
11/2/2011	8:48:07 PM	Bubbler valve opened
11/2/2011	8:48:07 PM	Helium MFC set to  500.000000
11/2/2011	8:48:07 PM	H2 MFC set to  0.000000
11/2/2011	8:48:07 PM	BCl3 MFC set to  0.000000
11/2/2011	8:48:07 PM	PHl3 MFC set to  0.000000
11/2/2011	8:48:07 PM	SiCl4 MFC set to  0.000000
11/2/2011	8:48:07 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:48:08 PM	Tube furnace set to 850
11/2/2011	8:51:08 PM	H2 valve closed
11/2/2011	8:51:08 PM	BCl3 valve closed
11/2/2011	8:51:08 PM	PH3 valve closed
11/2/2011	8:51:08 PM	SiCl4 pre valve closed
11/2/2011	8:51:08 PM	SiCl4 post valve closed
11/2/2011	8:51:08 PM	Main Vac valve closed
11/2/2011	8:51:08 PM	Bypass valve closed
11/2/2011	8:51:08 PM	Helium valve opened
11/2/2011	8:51:08 PM	Bubbler valve opened
11/2/2011	8:51:08 PM	Helium MFC set to  500.000000
11/2/2011	8:51:08 PM	H2 MFC set to  0.000000
11/2/2011	8:51:08 PM	BCl3 MFC set to  0.000000
11/2/2011	8:51:08 PM	PHl3 MFC set to  0.000000
11/2/2011	8:51:08 PM	SiCl4 MFC set to  0.000000
11/2/2011	8:51:08 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:51:08 PM	Tube furnace set to 800
11/2/2011	8:54:08 PM	H2 valve closed
11/2/2011	8:54:08 PM	BCl3 valve closed
11/2/2011	8:54:08 PM	PH3 valve closed
11/2/2011	8:54:08 PM	SiCl4 pre valve closed
11/2/2011	8:54:08 PM	SiCl4 post valve closed
11/2/2011	8:54:08 PM	Main Vac valve closed
11/2/2011	8:54:08 PM	Bypass valve closed
11/2/2011	8:54:08 PM	Helium valve opened
11/2/2011	8:54:08 PM	Bubbler valve opened
11/2/2011	8:54:08 PM	Helium MFC set to  500.000000
11/2/2011	8:54:08 PM	H2 MFC set to  0.000000
11/2/2011	8:54:08 PM	BCl3 MFC set to  0.000000
11/2/2011	8:54:08 PM	PHl3 MFC set to  0.000000
11/2/2011	8:54:08 PM	SiCl4 MFC set to  0.000000
11/2/2011	8:54:08 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:54:08 PM	Tube furnace set to 750
11/2/2011	8:57:08 PM	H2 valve closed
11/2/2011	8:57:08 PM	BCl3 valve closed
11/2/2011	8:57:08 PM	PH3 valve closed
11/2/2011	8:57:08 PM	SiCl4 pre valve closed
11/2/2011	8:57:08 PM	SiCl4 post valve closed
11/2/2011	8:57:08 PM	Main Vac valve closed
11/2/2011	8:57:08 PM	Bypass valve closed
11/2/2011	8:57:08 PM	Helium valve opened
11/2/2011	8:57:08 PM	Bubbler valve opened
11/2/2011	8:57:08 PM	Helium MFC set to  500.000000
11/2/2011	8:57:08 PM	H2 MFC set to  0.000000
11/2/2011	8:57:08 PM	BCl3 MFC set to  0.000000
11/2/2011	8:57:08 PM	PHl3 MFC set to  0.000000
11/2/2011	8:57:08 PM	SiCl4 MFC set to  0.000000
11/2/2011	8:57:08 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	8:57:08 PM	Tube furnace set to 0
11/2/2011	9:17:08 PM	Helium valve closed
11/2/2011	9:17:08 PM	H2 valve closed
11/2/2011	9:17:08 PM	BCl3 valve closed
11/2/2011	9:17:08 PM	PH3 valve closed
11/2/2011	9:17:08 PM	SiCl4 pre valve closed
11/2/2011	9:17:08 PM	SiCl4 post valve closed
11/2/2011	9:17:08 PM	Main Vac valve closed
11/2/2011	9:17:08 PM	Bypass valve closed
11/2/2011	9:17:08 PM	Bubbler valve closed
11/2/2011	9:17:08 PM	Helium MFC set to  0.000000
11/2/2011	9:17:08 PM	H2 MFC set to  0.000000
11/2/2011	9:17:08 PM	BCl3 MFC set to  0.000000
11/2/2011	9:17:08 PM	PHl3 MFC set to  0.000000
11/2/2011	9:17:08 PM	SiCl4 MFC set to  0.000000
11/2/2011	9:17:08 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:17:08 PM	Tube furnace set to 0
11/2/2011	9:17:09 PM	Run finished at 9:17 PM
11/2/2011	9:30:39 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	9:30:40 PM	Recipe started at 9:30 PM
11/2/2011	9:30:40 PM	Helium valve closed
11/2/2011	9:30:40 PM	H2 valve closed
11/2/2011	9:30:40 PM	BCl3 valve closed
11/2/2011	9:30:40 PM	PH3 valve closed
11/2/2011	9:30:40 PM	SiCl4 pre valve closed
11/2/2011	9:30:40 PM	SiCl4 post valve closed
11/2/2011	9:30:40 PM	Main Vac valve closed
11/2/2011	9:30:40 PM	Bubbler valve closed
11/2/2011	9:30:40 PM	Bypass valve opened
11/2/2011	9:30:40 PM	Helium MFC set to  0.000000
11/2/2011	9:30:40 PM	H2 MFC set to  0.000000
11/2/2011	9:30:40 PM	BCl3 MFC set to  0.000000
11/2/2011	9:30:40 PM	PHl3 MFC set to  0.000000
11/2/2011	9:30:40 PM	SiCl4 MFC set to  0.000000
11/2/2011	9:30:40 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:30:40 PM	Tube furnace set to 0
11/2/2011	9:31:37 PM	Helium valve closed
11/2/2011	9:31:37 PM	H2 valve closed
11/2/2011	9:31:37 PM	BCl3 valve closed
11/2/2011	9:31:37 PM	PH3 valve closed
11/2/2011	9:31:37 PM	SiCl4 pre valve closed
11/2/2011	9:31:37 PM	SiCl4 post valve closed
11/2/2011	9:31:37 PM	Main Vac valve closed
11/2/2011	9:31:37 PM	Bubbler valve closed
11/2/2011	9:31:37 PM	Bypass valve opened
11/2/2011	9:31:37 PM	Helium MFC set to  0.000000
11/2/2011	9:31:37 PM	H2 MFC set to  0.000000
11/2/2011	9:31:37 PM	BCl3 MFC set to  0.000000
11/2/2011	9:31:37 PM	PHl3 MFC set to  0.000000
11/2/2011	9:31:37 PM	SiCl4 MFC set to  0.000000
11/2/2011	9:31:37 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:31:37 PM	Tube furnace set to 0
11/2/2011	9:32:37 PM	Helium valve closed
11/2/2011	9:32:37 PM	H2 valve closed
11/2/2011	9:32:37 PM	BCl3 valve closed
11/2/2011	9:32:37 PM	PH3 valve closed
11/2/2011	9:32:37 PM	SiCl4 pre valve closed
11/2/2011	9:32:37 PM	SiCl4 post valve closed
11/2/2011	9:32:37 PM	Bypass valve closed
11/2/2011	9:32:37 PM	Bubbler valve closed
11/2/2011	9:32:37 PM	Main Vac valve opened
11/2/2011	9:32:37 PM	Helium MFC set to  0.000000
11/2/2011	9:32:37 PM	H2 MFC set to  0.000000
11/2/2011	9:32:37 PM	BCl3 MFC set to  0.000000
11/2/2011	9:32:37 PM	PHl3 MFC set to  0.000000
11/2/2011	9:32:37 PM	SiCl4 MFC set to  0.000000
11/2/2011	9:32:37 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	9:32:37 PM	Tube furnace set to 0
11/2/2011	9:32:38 PM	Run finished at 9:32 PM
11/2/2011	9:32:38 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	9:38:41 PM	Helium MFC set to  20.000000
11/2/2011	9:38:42 PM	Helium valve opened
11/2/2011	9:38:43 PM	Helium valve closed
11/2/2011	9:38:44 PM	Helium valve opened
11/2/2011	9:39:48 PM	Helium valve closed
11/2/2011	9:56:35 PM	Main Vac valve closed
11/2/2011	9:56:43 PM	Main Vac valve opened
11/2/2011	9:56:44 PM	Helium valve opened
11/2/2011	10:02:07 PM	Recipe started at 10:02 PM
11/2/2011	10:02:07 PM	Helium valve closed
11/2/2011	10:02:07 PM	H2 valve closed
11/2/2011	10:02:07 PM	BCl3 valve closed
11/2/2011	10:02:07 PM	PH3 valve closed
11/2/2011	10:02:07 PM	SiCl4 pre valve closed
11/2/2011	10:02:07 PM	SiCl4 post valve closed
11/2/2011	10:02:07 PM	Bypass valve closed
11/2/2011	10:02:07 PM	Bubbler valve closed
11/2/2011	10:02:07 PM	Main Vac valve opened
11/2/2011	10:02:07 PM	Helium MFC set to  0.000000
11/2/2011	10:02:07 PM	H2 MFC set to  0.000000
11/2/2011	10:02:07 PM	BCl3 MFC set to  0.000000
11/2/2011	10:02:07 PM	PHl3 MFC set to  0.000000
11/2/2011	10:02:07 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:02:07 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:02:07 PM	Tube furnace set to 0
11/2/2011	10:02:19 PM	Helium valve closed
11/2/2011	10:02:19 PM	H2 valve closed
11/2/2011	10:02:19 PM	BCl3 valve closed
11/2/2011	10:02:19 PM	PH3 valve closed
11/2/2011	10:02:19 PM	SiCl4 pre valve closed
11/2/2011	10:02:19 PM	SiCl4 post valve closed
11/2/2011	10:02:19 PM	Main Vac valve closed
11/2/2011	10:02:19 PM	Bypass valve closed
11/2/2011	10:02:19 PM	Bubbler valve closed
11/2/2011	10:02:19 PM	Helium MFC set to  0.000000
11/2/2011	10:02:19 PM	H2 MFC set to  0.000000
11/2/2011	10:02:19 PM	BCl3 MFC set to  0.000000
11/2/2011	10:02:19 PM	PHl3 MFC set to  0.000000
11/2/2011	10:02:19 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:02:19 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:02:19 PM	Tube furnace set to 0
11/2/2011	10:02:22 PM	Helium valve closed
11/2/2011	10:02:22 PM	BCl3 valve closed
11/2/2011	10:02:22 PM	PH3 valve closed
11/2/2011	10:02:22 PM	SiCl4 pre valve closed
11/2/2011	10:02:22 PM	SiCl4 post valve closed
11/2/2011	10:02:22 PM	Main Vac valve closed
11/2/2011	10:02:22 PM	Bypass valve closed
11/2/2011	10:02:22 PM	Bubbler valve closed
11/2/2011	10:02:22 PM	H2 valve opened
11/2/2011	10:02:22 PM	Helium MFC set to  0.000000
11/2/2011	10:02:22 PM	H2 MFC set to  500.000000
11/2/2011	10:02:22 PM	BCl3 MFC set to  0.000000
11/2/2011	10:02:22 PM	PHl3 MFC set to  0.000000
11/2/2011	10:02:22 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:02:22 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:02:22 PM	Tube furnace set to 0
11/2/2011	10:03:24 PM	Helium valve closed
11/2/2011	10:03:24 PM	BCl3 valve closed
11/2/2011	10:03:24 PM	PH3 valve closed
11/2/2011	10:03:24 PM	SiCl4 pre valve closed
11/2/2011	10:03:24 PM	SiCl4 post valve closed
11/2/2011	10:03:24 PM	Main Vac valve closed
11/2/2011	10:03:24 PM	Bypass valve closed
11/2/2011	10:03:24 PM	H2 valve opened
11/2/2011	10:03:24 PM	Bubbler valve opened
11/2/2011	10:03:24 PM	Helium MFC set to  0.000000
11/2/2011	10:03:24 PM	H2 MFC set to  500.000000
11/2/2011	10:03:24 PM	BCl3 MFC set to  0.000000
11/2/2011	10:03:24 PM	PHl3 MFC set to  0.000000
11/2/2011	10:03:24 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:03:24 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:03:24 PM	Tube furnace set to 0
11/2/2011	10:03:25 PM	Helium valve closed
11/2/2011	10:03:25 PM	BCl3 valve closed
11/2/2011	10:03:25 PM	PH3 valve closed
11/2/2011	10:03:25 PM	SiCl4 pre valve closed
11/2/2011	10:03:25 PM	SiCl4 post valve closed
11/2/2011	10:03:25 PM	Main Vac valve closed
11/2/2011	10:03:25 PM	Bypass valve closed
11/2/2011	10:03:25 PM	H2 valve opened
11/2/2011	10:03:25 PM	Bubbler valve opened
11/2/2011	10:03:25 PM	Helium MFC set to  0.000000
11/2/2011	10:03:25 PM	H2 MFC set to  500.000000
11/2/2011	10:03:25 PM	BCl3 MFC set to  0.000000
11/2/2011	10:03:25 PM	PHl3 MFC set to  0.000000
11/2/2011	10:03:25 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:03:25 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:03:25 PM	Tube furnace set to 1025
11/2/2011	10:06:37 PM	Run aborted at 10:06 PM
11/2/2011	10:06:37 PM	Helium valve closed
11/2/2011	10:06:37 PM	H2 valve closed
11/2/2011	10:06:37 PM	BCl3 valve closed
11/2/2011	10:06:37 PM	PH3 valve closed
11/2/2011	10:06:37 PM	SiCl4 pre valve closed
11/2/2011	10:06:37 PM	SiCl4 post valve closed
11/2/2011	10:06:37 PM	Bypass valve closed
11/2/2011	10:06:37 PM	Main Vac valve closed
11/2/2011	10:06:37 PM	Bubbler valve closed
11/2/2011	10:06:37 PM	Helium MFC set to  0.000000
11/2/2011	10:06:37 PM	H2 MFC set to  0.000000
11/2/2011	10:06:37 PM	BCl3 MFC set to  0.000000
11/2/2011	10:06:37 PM	PHl3 MFC set to  0.000000
11/2/2011	10:06:37 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:06:37 PM	Tube furnace set to 0
11/2/2011	10:06:49 PM	Executing task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	10:06:50 PM	Recipe started at 10:06 PM
11/2/2011	10:06:50 PM	Helium valve closed
11/2/2011	10:06:50 PM	H2 valve closed
11/2/2011	10:06:50 PM	BCl3 valve closed
11/2/2011	10:06:50 PM	PH3 valve closed
11/2/2011	10:06:50 PM	SiCl4 pre valve closed
11/2/2011	10:06:50 PM	SiCl4 post valve closed
11/2/2011	10:06:50 PM	Main Vac valve closed
11/2/2011	10:06:50 PM	Bubbler valve closed
11/2/2011	10:06:50 PM	Bypass valve opened
11/2/2011	10:06:50 PM	Helium MFC set to  0.000000
11/2/2011	10:06:50 PM	H2 MFC set to  0.000000
11/2/2011	10:06:50 PM	BCl3 MFC set to  0.000000
11/2/2011	10:06:50 PM	PHl3 MFC set to  0.000000
11/2/2011	10:06:50 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:06:50 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:06:50 PM	Tube furnace set to 0
11/2/2011	10:07:21 PM	Helium valve closed
11/2/2011	10:07:21 PM	H2 valve closed
11/2/2011	10:07:21 PM	BCl3 valve closed
11/2/2011	10:07:21 PM	PH3 valve closed
11/2/2011	10:07:21 PM	SiCl4 pre valve closed
11/2/2011	10:07:21 PM	SiCl4 post valve closed
11/2/2011	10:07:21 PM	Main Vac valve closed
11/2/2011	10:07:21 PM	Bubbler valve closed
11/2/2011	10:07:21 PM	Bypass valve opened
11/2/2011	10:07:21 PM	Helium MFC set to  0.000000
11/2/2011	10:07:21 PM	H2 MFC set to  0.000000
11/2/2011	10:07:21 PM	BCl3 MFC set to  0.000000
11/2/2011	10:07:21 PM	PHl3 MFC set to  0.000000
11/2/2011	10:07:21 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:07:21 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:07:21 PM	Tube furnace set to 0
11/2/2011	10:07:27 PM	Helium valve closed
11/2/2011	10:07:27 PM	H2 valve closed
11/2/2011	10:07:27 PM	BCl3 valve closed
11/2/2011	10:07:27 PM	PH3 valve closed
11/2/2011	10:07:27 PM	SiCl4 pre valve closed
11/2/2011	10:07:27 PM	SiCl4 post valve closed
11/2/2011	10:07:27 PM	Bypass valve closed
11/2/2011	10:07:27 PM	Bubbler valve closed
11/2/2011	10:07:27 PM	Main Vac valve opened
11/2/2011	10:07:27 PM	Helium MFC set to  0.000000
11/2/2011	10:07:27 PM	H2 MFC set to  0.000000
11/2/2011	10:07:27 PM	BCl3 MFC set to  0.000000
11/2/2011	10:07:27 PM	PHl3 MFC set to  0.000000
11/2/2011	10:07:27 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:07:27 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:07:27 PM	Tube furnace set to 0
11/2/2011	10:07:28 PM	Run finished at 10:07 PM
11/2/2011	10:07:28 PM	Completed task C:\Users\Si CVD\CVD_Control\tasks\pumpdown.xml
11/2/2011	10:08:52 PM	Helium MFC set to  20.000000
11/2/2011	10:08:53 PM	Helium valve opened
11/2/2011	10:10:33 PM	Helium valve closed
11/2/2011	10:13:36 PM	Recipe started at 10:13 PM
11/2/2011	10:13:36 PM	Helium valve closed
11/2/2011	10:13:36 PM	H2 valve closed
11/2/2011	10:13:36 PM	BCl3 valve closed
11/2/2011	10:13:36 PM	PH3 valve closed
11/2/2011	10:13:36 PM	SiCl4 pre valve closed
11/2/2011	10:13:36 PM	SiCl4 post valve closed
11/2/2011	10:13:36 PM	Bypass valve closed
11/2/2011	10:13:36 PM	Bubbler valve closed
11/2/2011	10:13:36 PM	Main Vac valve opened
11/2/2011	10:13:36 PM	Helium MFC set to  0.000000
11/2/2011	10:13:36 PM	H2 MFC set to  0.000000
11/2/2011	10:13:36 PM	BCl3 MFC set to  0.000000
11/2/2011	10:13:36 PM	PHl3 MFC set to  0.000000
11/2/2011	10:13:36 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:13:36 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:13:36 PM	Tube furnace set to 0
11/2/2011	10:13:40 PM	Helium valve closed
11/2/2011	10:13:40 PM	H2 valve closed
11/2/2011	10:13:40 PM	BCl3 valve closed
11/2/2011	10:13:40 PM	PH3 valve closed
11/2/2011	10:13:40 PM	SiCl4 pre valve closed
11/2/2011	10:13:40 PM	SiCl4 post valve closed
11/2/2011	10:13:40 PM	Main Vac valve closed
11/2/2011	10:13:40 PM	Bypass valve closed
11/2/2011	10:13:40 PM	Bubbler valve closed
11/2/2011	10:13:40 PM	Helium MFC set to  0.000000
11/2/2011	10:13:40 PM	H2 MFC set to  0.000000
11/2/2011	10:13:40 PM	BCl3 MFC set to  0.000000
11/2/2011	10:13:40 PM	PHl3 MFC set to  0.000000
11/2/2011	10:13:41 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:13:41 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:13:41 PM	Tube furnace set to 0
11/2/2011	10:13:44 PM	Helium valve closed
11/2/2011	10:13:44 PM	BCl3 valve closed
11/2/2011	10:13:44 PM	PH3 valve closed
11/2/2011	10:13:44 PM	SiCl4 pre valve closed
11/2/2011	10:13:44 PM	SiCl4 post valve closed
11/2/2011	10:13:44 PM	Main Vac valve closed
11/2/2011	10:13:44 PM	Bypass valve closed
11/2/2011	10:13:44 PM	Bubbler valve closed
11/2/2011	10:13:44 PM	H2 valve opened
11/2/2011	10:13:44 PM	Helium MFC set to  0.000000
11/2/2011	10:13:44 PM	H2 MFC set to  500.000000
11/2/2011	10:13:44 PM	BCl3 MFC set to  0.000000
11/2/2011	10:13:44 PM	PHl3 MFC set to  0.000000
11/2/2011	10:13:44 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:13:44 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:13:44 PM	Tube furnace set to 0
11/2/2011	10:14:45 PM	Helium valve closed
11/2/2011	10:14:45 PM	BCl3 valve closed
11/2/2011	10:14:45 PM	PH3 valve closed
11/2/2011	10:14:45 PM	SiCl4 pre valve closed
11/2/2011	10:14:45 PM	SiCl4 post valve closed
11/2/2011	10:14:45 PM	Main Vac valve closed
11/2/2011	10:14:45 PM	Bypass valve closed
11/2/2011	10:14:45 PM	H2 valve opened
11/2/2011	10:14:45 PM	Bubbler valve opened
11/2/2011	10:14:45 PM	Helium MFC set to  0.000000
11/2/2011	10:14:45 PM	H2 MFC set to  500.000000
11/2/2011	10:14:45 PM	BCl3 MFC set to  0.000000
11/2/2011	10:14:45 PM	PHl3 MFC set to  0.000000
11/2/2011	10:14:45 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:14:45 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:14:46 PM	Tube furnace set to 0
11/2/2011	10:14:47 PM	Helium valve closed
11/2/2011	10:14:47 PM	BCl3 valve closed
11/2/2011	10:14:47 PM	PH3 valve closed
11/2/2011	10:14:47 PM	SiCl4 pre valve closed
11/2/2011	10:14:47 PM	SiCl4 post valve closed
11/2/2011	10:14:47 PM	Main Vac valve closed
11/2/2011	10:14:47 PM	Bypass valve closed
11/2/2011	10:14:47 PM	H2 valve opened
11/2/2011	10:14:47 PM	Bubbler valve opened
11/2/2011	10:14:47 PM	Helium MFC set to  0.000000
11/2/2011	10:14:47 PM	H2 MFC set to  500.000000
11/2/2011	10:14:47 PM	BCl3 MFC set to  0.000000
11/2/2011	10:14:47 PM	PHl3 MFC set to  0.000000
11/2/2011	10:14:47 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:14:47 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:14:47 PM	Tube furnace set to 1025
11/2/2011	10:34:47 PM	Helium valve closed
11/2/2011	10:34:47 PM	BCl3 valve closed
11/2/2011	10:34:47 PM	PH3 valve closed
11/2/2011	10:34:47 PM	Main Vac valve closed
11/2/2011	10:34:47 PM	Bypass valve closed
11/2/2011	10:34:47 PM	H2 valve opened
11/2/2011	10:34:47 PM	SiCl4 pre valve opened
11/2/2011	10:34:47 PM	SiCl4 post valve opened
11/2/2011	10:34:47 PM	Bubbler valve opened
11/2/2011	10:34:47 PM	Helium MFC set to  0.000000
11/2/2011	10:34:47 PM	H2 MFC set to  500.000000
11/2/2011	10:34:47 PM	BCl3 MFC set to  0.000000
11/2/2011	10:34:47 PM	PHl3 MFC set to  0.000000
11/2/2011	10:34:47 PM	SiCl4 MFC set to  50.000000
11/2/2011	10:34:47 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:34:47 PM	Tube furnace set to 1025
11/2/2011	10:54:47 PM	Helium valve closed
11/2/2011	10:54:47 PM	BCl3 valve closed
11/2/2011	10:54:47 PM	PH3 valve closed
11/2/2011	10:54:47 PM	SiCl4 pre valve closed
11/2/2011	10:54:47 PM	SiCl4 post valve closed
11/2/2011	10:54:47 PM	Main Vac valve closed
11/2/2011	10:54:47 PM	Bypass valve closed
11/2/2011	10:54:47 PM	H2 valve opened
11/2/2011	10:54:47 PM	Bubbler valve opened
11/2/2011	10:54:47 PM	Helium MFC set to  0.000000
11/2/2011	10:54:47 PM	H2 MFC set to  500.000000
11/2/2011	10:54:47 PM	BCl3 MFC set to  0.000000
11/2/2011	10:54:47 PM	PHl3 MFC set to  0.000000
11/2/2011	10:54:47 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:54:47 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:54:47 PM	Tube furnace set to 950
11/2/2011	10:57:47 PM	H2 valve closed
11/2/2011	10:57:47 PM	BCl3 valve closed
11/2/2011	10:57:47 PM	PH3 valve closed
11/2/2011	10:57:47 PM	SiCl4 pre valve closed
11/2/2011	10:57:47 PM	SiCl4 post valve closed
11/2/2011	10:57:47 PM	Main Vac valve closed
11/2/2011	10:57:47 PM	Bypass valve closed
11/2/2011	10:57:47 PM	Helium valve opened
11/2/2011	10:57:47 PM	Bubbler valve opened
11/2/2011	10:57:47 PM	Helium MFC set to  500.000000
11/2/2011	10:57:47 PM	H2 MFC set to  0.000000
11/2/2011	10:57:47 PM	BCl3 MFC set to  0.000000
11/2/2011	10:57:47 PM	PHl3 MFC set to  0.000000
11/2/2011	10:57:47 PM	SiCl4 MFC set to  0.000000
11/2/2011	10:57:47 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	10:57:47 PM	Tube furnace set to 900
11/2/2011	11:00:47 PM	H2 valve closed
11/2/2011	11:00:47 PM	BCl3 valve closed
11/2/2011	11:00:47 PM	PH3 valve closed
11/2/2011	11:00:47 PM	SiCl4 pre valve closed
11/2/2011	11:00:47 PM	SiCl4 post valve closed
11/2/2011	11:00:47 PM	Main Vac valve closed
11/2/2011	11:00:47 PM	Bypass valve closed
11/2/2011	11:00:47 PM	Helium valve opened
11/2/2011	11:00:47 PM	Bubbler valve opened
11/2/2011	11:00:47 PM	Helium MFC set to  500.000000
11/2/2011	11:00:47 PM	H2 MFC set to  0.000000
11/2/2011	11:00:47 PM	BCl3 MFC set to  0.000000
11/2/2011	11:00:47 PM	PHl3 MFC set to  0.000000
11/2/2011	11:00:47 PM	SiCl4 MFC set to  0.000000
11/2/2011	11:00:47 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:00:47 PM	Tube furnace set to 850
11/2/2011	11:03:47 PM	H2 valve closed
11/2/2011	11:03:47 PM	BCl3 valve closed
11/2/2011	11:03:47 PM	PH3 valve closed
11/2/2011	11:03:47 PM	SiCl4 pre valve closed
11/2/2011	11:03:47 PM	SiCl4 post valve closed
11/2/2011	11:03:47 PM	Main Vac valve closed
11/2/2011	11:03:47 PM	Bypass valve closed
11/2/2011	11:03:47 PM	Helium valve opened
11/2/2011	11:03:47 PM	Bubbler valve opened
11/2/2011	11:03:47 PM	Helium MFC set to  500.000000
11/2/2011	11:03:47 PM	H2 MFC set to  0.000000
11/2/2011	11:03:47 PM	BCl3 MFC set to  0.000000
11/2/2011	11:03:47 PM	PHl3 MFC set to  0.000000
11/2/2011	11:03:47 PM	SiCl4 MFC set to  0.000000
11/2/2011	11:03:47 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:03:48 PM	Tube furnace set to 800
11/2/2011	11:06:48 PM	H2 valve closed
11/2/2011	11:06:48 PM	BCl3 valve closed
11/2/2011	11:06:48 PM	PH3 valve closed
11/2/2011	11:06:48 PM	SiCl4 pre valve closed
11/2/2011	11:06:48 PM	SiCl4 post valve closed
11/2/2011	11:06:48 PM	Main Vac valve closed
11/2/2011	11:06:48 PM	Bypass valve closed
11/2/2011	11:06:48 PM	Helium valve opened
11/2/2011	11:06:48 PM	Bubbler valve opened
11/2/2011	11:06:48 PM	Helium MFC set to  500.000000
11/2/2011	11:06:48 PM	H2 MFC set to  0.000000
11/2/2011	11:06:48 PM	BCl3 MFC set to  0.000000
11/2/2011	11:06:48 PM	PHl3 MFC set to  0.000000
11/2/2011	11:06:48 PM	SiCl4 MFC set to  0.000000
11/2/2011	11:06:48 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:06:48 PM	Tube furnace set to 750
11/2/2011	11:09:48 PM	H2 valve closed
11/2/2011	11:09:48 PM	BCl3 valve closed
11/2/2011	11:09:48 PM	PH3 valve closed
11/2/2011	11:09:48 PM	SiCl4 pre valve closed
11/2/2011	11:09:48 PM	SiCl4 post valve closed
11/2/2011	11:09:48 PM	Main Vac valve closed
11/2/2011	11:09:48 PM	Bypass valve closed
11/2/2011	11:09:48 PM	Helium valve opened
11/2/2011	11:09:48 PM	Bubbler valve opened
11/2/2011	11:09:48 PM	Helium MFC set to  500.000000
11/2/2011	11:09:48 PM	H2 MFC set to  0.000000
11/2/2011	11:09:48 PM	BCl3 MFC set to  0.000000
11/2/2011	11:09:48 PM	PHl3 MFC set to  0.000000
11/2/2011	11:09:48 PM	SiCl4 MFC set to  0.000000
11/2/2011	11:09:48 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:09:48 PM	Tube furnace set to 0
11/2/2011	11:49:48 PM	Helium valve closed
11/2/2011	11:49:48 PM	H2 valve closed
11/2/2011	11:49:48 PM	BCl3 valve closed
11/2/2011	11:49:48 PM	PH3 valve closed
11/2/2011	11:49:48 PM	SiCl4 pre valve closed
11/2/2011	11:49:48 PM	SiCl4 post valve closed
11/2/2011	11:49:48 PM	Main Vac valve closed
11/2/2011	11:49:48 PM	Bypass valve closed
11/2/2011	11:49:48 PM	Bubbler valve closed
11/2/2011	11:49:48 PM	Helium MFC set to  0.000000
11/2/2011	11:49:48 PM	H2 MFC set to  0.000000
11/2/2011	11:49:48 PM	BCl3 MFC set to  0.000000
11/2/2011	11:49:48 PM	PHl3 MFC set to  0.000000
11/2/2011	11:49:48 PM	SiCl4 MFC set to  0.000000
11/2/2011	11:49:48 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:49:48 PM	Tube furnace set to 0
11/2/2011	11:49:51 PM	Helium valve closed
11/2/2011	11:49:51 PM	H2 valve closed
11/2/2011	11:49:51 PM	BCl3 valve closed
11/2/2011	11:49:51 PM	PH3 valve closed
11/2/2011	11:49:51 PM	SiCl4 pre valve closed
11/2/2011	11:49:51 PM	SiCl4 post valve closed
11/2/2011	11:49:51 PM	Main Vac valve closed
11/2/2011	11:49:51 PM	Bubbler valve closed
11/2/2011	11:49:51 PM	Bypass valve opened
11/2/2011	11:49:51 PM	Helium MFC set to  0.000000
11/2/2011	11:49:51 PM	H2 MFC set to  0.000000
11/2/2011	11:49:51 PM	BCl3 MFC set to  0.000000
11/2/2011	11:49:51 PM	PHl3 MFC set to  0.000000
11/2/2011	11:49:51 PM	SiCl4 MFC set to  0.000000
11/2/2011	11:49:51 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:49:51 PM	Tube furnace set to 0
11/2/2011	11:50:39 PM	Helium valve closed
11/2/2011	11:50:39 PM	H2 valve closed
11/2/2011	11:50:39 PM	BCl3 valve closed
11/2/2011	11:50:39 PM	PH3 valve closed
11/2/2011	11:50:39 PM	SiCl4 pre valve closed
11/2/2011	11:50:39 PM	SiCl4 post valve closed
11/2/2011	11:50:39 PM	Bypass valve closed
11/2/2011	11:50:39 PM	Bubbler valve closed
11/2/2011	11:50:39 PM	Main Vac valve opened
11/2/2011	11:50:39 PM	Helium MFC set to  0.000000
11/2/2011	11:50:39 PM	H2 MFC set to  0.000000
11/2/2011	11:50:39 PM	BCl3 MFC set to  0.000000
11/2/2011	11:50:39 PM	PHl3 MFC set to  0.000000
11/2/2011	11:50:39 PM	SiCl4 MFC set to  0.000000
11/2/2011	11:50:39 PM	Bypass solenoid MFC set to  0.000000
11/2/2011	11:50:39 PM	Tube furnace set to 0
11/2/2011	11:50:40 PM	Run finished at 11:50 PM
